Towards a 3D characterization of solids by MCs+ SIMS

Surface and Interface Analysis

Volumn 24, Issue 8, 1996, Pages 483-489

  Gnaser, Hubert ^a  

^a Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CESIUM; IMAGE RECONSTRUCTION; IMAGE RECORDING; ION BOMBARDMENT; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTOR MATERIALS; SPUTTERING; THREE DIMENSIONAL;

ELEMENTAL DISTRIBUTION MAPS; RELATIVE DENSITIVITY FACTORS;

SURFACES;

EID: 0030212774     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(sici)1096-9918(199608)24:8<483::aid-sia141>3.0.co;2-2     Document Type: Article

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