Investigations of nanocrystalline SnS films' surface morphology modification during inductively coupled argon plasma sputtering

Semiconductor Science and Technology

Volumn 29, Issue 1, 2014, Pages

  Zimin, S P ^a   Gorlachev, E S ^a,b   Amirov, I I ^b   Naumov, V V ^b   Dubov, G A ^a   Gremenok, V F ^c   Bashkirov, S A ^c  

^a YAROSLAVL STATE UNIVERSITY   (Russian Federation)

^b Institute of Physics and Technology   (Russian Federation)

^c INSTITUTE OF SOLID STATE AND SEMICONDUCTOR PHYSICS   (Belarus)

Author keywords

atomic force microscopy; hot wall deposition; inductively coupled plasma; nanocrystalline films; plasma sputtering; Raman spectroscopy; scanning electron microscopy; surface modification; tin sulphide; x ray diffractometry

Indexed keywords

CHEMICAL COMPOSITIONS; ENERGY DISPERSIVE X-RAY SPECTROSCOPY; HOT WALL DEPOSITION; INDUCTIVELY-COUPLED; NANO-CRYSTALLINE FILMS; PLASMA SPUTTERING; SURFACE SMOOTHING; TIN SULPHIDE;

ATOMIC FORCE MICROSCOPY; DEPOSITION; ENERGY DISPERSIVE SPECTROSCOPY; INDUCTIVELY COUPLED PLASMA; PLASMA APPLICATIONS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SPUTTERING; SUBSTRATES; SURFACE TREATMENT; X RAY DIFFRACTION ANALYSIS;

ARGON;

EID: 84891273540     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/29/1/015009     Document Type: Article

References (36)

1. Tang J and Sargent E H 2011 Adv. Mater. 23 12
2. Bashkirov S A, Gremenok V F and Ivanov V A 2011 Semiconductors 45 749
3. Ortiz A and Lopez S 1994 Semicond. Sci. Technol. 9 2130
4. Sajeesh T H, Warrier A R, Kartha C S and Vijayakumar K P 2010 Thin Solid Films 518 4370
5. Guneri E, Gode F, Ulutas C, Kirmizigul F, Altindemir G and Gumus C 2010 Chalcogenide Lett. 7 685
6. Sinsermsuksakul P, Heo J, Noh W, Hock A S and Gordon R G 2011 Adv. Energy Mater. 1 1116
7. Hartman K, Johnson J L, Bertoni M I, Recht D, Aziz M J, Scarpulla M A and Buonassisi T 2011 Thin Solid Films 519 7421
8. Tanusevski A and Poelman D 2003 Sol. Energy Mater. Sol. Cells 80 297
9. Ghosh B, Das M, Banerjee P and Das S 2008 Appl. Surf. Sci. 254 6436
10. Biswas S, Kar S and Chaudhuri S 2007 Appl. Surf. Sci. 253 9259 (Pubitemid 47320848)
11. Leach M, Reddy K T R, Reddy M V, Tan J K, Jang D Y and Miles R W 2012 Energy Procedia 15 371
12. Noguchi H, Setiyadi A, Tanamura H, Nagatomo T and Omoto O 1994 Sol. Energy Mater. Sol. Cells 35 325
13. Reddy K T R, Reddy N K and Miles R W 2006 Sol. Energy Mater. Sol. Cells 90 3041 (Pubitemid 44332083)
14. Avellaneda D, Nair M T S and Nair P K 2009 Thin Solid Films 517 2500
15. Ogah O E, Reddy K R, Zoppi G, Forbes I and Miles R W 2011 Thin Solid Films 519 7425
16. Sinsermsuksakul P, Hartman K, Kim S B, Heo J, Sun L, Park H H, Chakraborty R, Buonassisi T and Gordon R G 2013 Appl. Phys. Lett. 102 053901
17. Keshri A K and Agarwal A 2012 Nanosci. Nanotechnol. Lett. 4 228
18. Martínez H and Avellaneda D 2012 Nucl. Instrum. Methods Phys. Res. B 272 351
19. Ruffino F, De Bastiani R, Grimaldi M G, Bongiorno C, Giannazzo F, Roccaforte F, Spinella C and Raineri V 2007 Nucl. Instrum. Methods Phys. Res. B 257 810 (Pubitemid 46498318)
20. Zimin S P, Gorlachev E S, Amirov I I and Zogg H 2009 J. Phys. D: Appl. Phys. 42 165205
21. Zimin S P, Amirov I I and Gorlachev E S 2011 Semicond. Sci. Technol. 26 055018
22. Zimin S P, Gorlachev E S, Amirov I I, Zogg H, Abramof E and Rappl P H O 2011 Semicond. Sci. Technol. 26 105003
23. Bashkirov S A, Gremenok V F, Ivanov V A and Shevtsova V V 2012 Phys. Solid State 54 2497
24. An C, Tang K, Shen G, Wang C, Yang Q, Hai B and Qian Y 2002 J. Cryst. Growth 244 333
25. Chandrasekhar H R, Humphreys R G, Zwick U and Cardona M 1977 Phys. Rev. B 15 2177
26. Mathews N R, García C C and Torres I Z 2013 Mater. Sci. Semicond. Process. 16 29
27. Parkin I P, Price L S, Hibbert T G and Molloy K C 2001 J. Mater. Chem. 11 1486 (Pubitemid 32436546)
28. Malaquias J, Fernandes P A, Salomé P M P and Cunha A F 2011 Thin Solid Films 519 7416
29. Cheng S, He Y, Chen G, Cho E-C and Conibeer G 2008 Surf. Coat. Technol. 202 6070
30. Sohila S, Rajalakshmi M, Ghosh C, Arora A K and Muthamizhchelvan C 2011 J. Alloys Compd. 509 5843
31. Ogah O E, Zoppi G, Forbes I and Miles R W 2009 Thin Solid Films 517 2485
32. Kim J Y and George S M 2010 J. Phys. Chem. C 114 17597
33. Tuboltsev V and Räisänen J 2009 Small 5 2687
34. Piacente V, Foglia S and Scardala P 1991 J. Alloys Compd. 177 17
35. Snyders R, Gouttebaron R, Dauchot J P and Hecq M 2005 Surf. Coat. Technol. 200 448 (Pubitemid 41268963)
36. Snyders R, Dauchot J-P and Hecq M 2007 Plasma Process. Polym. 4 113 (Pubitemid 46416309)