Pin-joint design effect on the reliability of a polysilicon microengine

IEEE International Reliability Physics Symposium Proceedings

Volumn 2002-January, Issue , 2002, Pages 122-129

  Tanner, D M ^a   Walraven, J A ^a   Mani, S S ^a   Swanson, S E ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Acceleration; Adhesives; Coatings; Failure analysis; Gears; Hydraulic actuators; Laboratories; Microelectromechanical systems; Micromechanical devices; Silicon

Indexed keywords

ACCELERATION; ADHESIVES; CARBON; CARBON DIOXIDE; COATINGS; DEBRIS; ELECTROMECHANICAL DEVICES; FAILURE ANALYSIS; GEARS; HYDRAULIC ACTUATORS; LABORATORIES; MEMS; MICROELECTROMECHANICAL DEVICES; SELF ASSEMBLED MONOLAYERS; SILICON; SUPERCRITICAL FLUID EXTRACTION;

ACCELERATED STRESS; FAILURE DISTRIBUTIONS; MICROMECHANICAL DEVICE; RUBBING SURFACES; SELF-ASSEMBLED MONOLAYER COATINGS; SUPERCRITICAL CARBON DIOXIDES; SURFACE COATINGS; VARIED PARAMETERS;

RELIABILITY;

EID: 84889448173     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RELPHY.2002.996623     Document Type: Conference Paper

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