Characterization techniques for surface-micromachined devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3514, Issue , 1998, Pages 431-438

  Eaton, William P ^a   Smith, Norman F ^a   Irwin, Lloyd ^a   Tanner, Danelle M ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC VARIABLES MEASUREMENT; MICROMACHINING; NATURAL FREQUENCIES; OPTIMIZATION;

MICROENGINE; SURFACE MICROMACHINED DEVICES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032305323     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)