Structure, electrical conductivity, critical superconducting temperature and mechanical properties of TiNxOy thin films

Surface and Coatings Technology

Volumn 237, Issue , 2013, Pages 196-204

  Goupy, J ^a,b   Djemia, P ^c   Pouget, S ^b   Belliard, L ^d   Abadias, G ^e   Villegier J C ^b   Sauvageot, J L ^a   Pigot, C ^a  

^a CENTRE D ETUDES DE SACLAY   (France)

^b CEA GRENOBLE   (France)

^c CNRS   (France)

^d SORBONNE UNIVERSITÉ   (France)

^e UNIVERSITÉ DE POITIERS   (France)

Author keywords

Brillouin light scattering; Elastic constants; Electrical resistivity; Picosecond ultrasonic; Superconductivity; Titanium nitride

Indexed keywords

BRILLOUIN LIGHT SCATTERING; ELECTRICAL CONDUCTIVITY; NITROGEN CONCENTRATIONS; NUCLEAR REACTION ANALYSIS; PICOSECOND ULTRASONICS; REACTIVE DC MAGNETRON SPUTTERING; STRUCTURAL AND MECHANICAL PROPERTIES; SUPERCONDUCTING TEMPERATURES;

BRILLOUIN SCATTERING; ELASTIC CONSTANTS; ELECTRIC CONDUCTIVITY; ELECTRIC DISCHARGES; MECHANICAL PROPERTIES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SUPERCONDUCTIVITY; THIN FILMS; ULTRASONIC TESTING; X RAY DIFFRACTION;

TITANIUM NITRIDE;

EID: 84889087063     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2013.09.019     Document Type: Article

References (63)

1. Sundgren J.E. Thin Solid Films 1985, 128:21.
2. Hedenqvist P., Olsson M., Wallen P., Kassman A., Hogmark S., Jacobson S. Surf. Coat. Technol. 1990, 41:243.
3. Mayrhofer P.H., Mitterer C., Hultman L., Clemens H. Prog. Mater. Sci. 2006, 51:1032.
4. Pfeiler M., Sheu C., Hutter H., Schnöller J., Michotte C., Mitterer C., Kathrein M. J. Vac. Sci. Technol. A 2009, 27:554.
5. Matenoglou G.M., Koutsokeras L.E., Patsalas P. Appl. Phys. Lett. 2009, 94:152108.
6. Probst J., Gbureck U., Thull R. Surf. Coat. Technol. 2001, 148:226.
7. Mahieu S., Leroy W.P., Van Aeken K., Wolter M., Colaux J., Lucas S., Abadias G., Matthys P., Depla D. Sol. Energy 2011, 85:538.
8. Elowe P.R., Stempki M.A., Rozeveld S.J., De Groot M.W. Chem. Mater. 2011, 23:3915.
9. Aouadi S.M. J. Appl. Phys. 2006, 99:053507.
10. Matenoglou G.M., Koutsokeras L.E., Lekka Ch.E., Abadias G., Kosmidis C., Evangelakis G.A., Patsalas P. Surf. Coat. Technol. 2009, 204:911.
11. Sangiovanni D.G., Chirita V., Hultman L. Phys. Rev. B. 2010, 81:104107.
12. Mayrhofer P.H., Music D., Schneider J.M. J. Appl. Phys. 2006, 100:094906.
13. Koutsokeras L.E., Abadias G., Lekka Ch.E., Matenoglou G.M., Anagnostopoulos D., Evangelakis G.A., Patsalas P. Appl. Phys. Lett. 2008, 93:011904.
14. Abadias G., Koutsokeras L.E., Dub S.N., Tolmachova G.N., Debelle A., Sauvage T., Villechaise P. J. Vac. Sci. Technol. A 2010, 28:541.
15. Koutsokeras L.E., Abadias G., Patsalas P. J. Appl. Phys. 2011, 110:043535.
16. Uglov V.V., Anishchik V.M., Zlotski S.V., Abadias G. Surf. Coat. Technol. 2006, 200:6389.
17. Holec D., Friàk M., Neugebauer J., Mayrhofer P.H. Phys. Rev. B. 2012, 85:064101.
18. Zhang J., Guo W.Y., Zhang Y., Guo Q., Wang C., Zhang L.P. Thin Solid Films 2009, 517:4830.
19. Donohue L.A., Cawley J., Brooks J.S. Surf. Coat. Technol. 1995, 72:128.
20. Grimberg I., Zhitomirsky V.N., Boxman R.L., Goldsmith S., Weiss B.Z. Surf. Coat. Technol. 1998, 108-109:154.
21. Lind H., Forsén R., Alling B., Ghafoor N., Tasnádi F., Johansson M.P., Abrikosov I.A., Odén M. Appl. Phys. Lett. 2011, 99:091903.
22. Liang S.-C., Tsai D.-C., Chang Z.-C., Sung H.-S., Lin Y.-C., Yeh Y.-J., Deng M.-J., Shieu F.-S. Appl. Surf. Sci. 2011, 258:399.
23. Abadias G. Surf. Coat. Technol. 2008, 202:2223.
24. Kral C., Lengauer W., Rafaja D., Ettmayer P. J. Alloy. Comp. 1998, 265:215.
25. Bourbia O., Achour S., Tabet N., Parlinska M., Harabi A. Thin Solid Films 2007, 515:6758.
26. Jhi S.-H., Ihm J. Phys. Rev. B 1997, 56:13826.
27. Ahuja R., Eriksson O., Wills J.M., Johansson B. Phys. Rev. B 1996, 53:3072.
28. Holleck H. J. Vac. Sci. Technol. A 1986, 4:2661.
29. Matenoglou G.M., Lekka Ch.E., Koutsokeras L.E., Karras G., Kosmidis C., Evangelakis G.A., Patsalas P. J. Appl. Phys. 2009, 105:103714.
30. Choy M.M., Cook W.R., Hearmon R.F.S., Jaffe H., Jerphagon J., Kurtz S.K., Liu S.T., Nelson D.F. Elastic, Piezoelectric, Pyroelectric, Piezooptic, Electrooptic Constants, and Nonlinear Dielectric Susceptibilities of Crystals. Landolt-Börnstein: Numerical Data and Functional Relationships in Science and Technology 1979, vol. 11. Springer, Berlin.
31. Isaev E.I., Simak S.I., Abrikosov I.A., Ahuja R., Vekilov Yu.Kh., Katsnelson M.I., Lichtenstein A.I., Johansson B. J. Appl. Phys. 2007, 101:123519.
32. Kim J.O., Achenbach J.D., Mirkarimi P.B., Shin M., Barnett S.A. J. Appl. Phys. 1992, 72:1805.
33. Pang W., Stoddart P.R., Comins J.D., Every A.G., Pietersen D., Marais P.J. Int. J. Refract. Met. Hard Mater. 1997, 15:179.
34. Bhushan B., Gupta B.K. Handbook of Tribology: Materials, Coatings, and Surface Treatments 1991, McGraw-Hill, New York.
35. Hu Q., Kádas K., Hogmark S., Yang R., Johansson B., Vitos L. J. Appl. Phys. 2008, 103:083505.
36. Djemia P., Benhamida M., Bouamama Kh., Belliard L., Faurie D., Abadias G. Surf. Coat. Technol. 2013, 215:199.
37. Lee T., Ohmori K., Shin C.S., Cahill D.G., Petrov I., Greene J.E. Phys. Rev. B 2005, 71:144106.
38. Comins J.D., Pang W., Every A.G., Pietersen D. Int. J. Refract. Met. Hard Mater. 1998, 16:389.
39. Mridha S., Baker T.N. Mater. Sci. Eng. 1994, 188:229.
40. Hu C., Zeng Z., Zhang Lin, Chen X., Cai L., Alfè D. J. Appl. Phys. 2010, 107:093509.
41. Zhang J., Zhao Y., Hixson R.S., Gray G.T., Wang L.P., Utsumi W., Hiroyuki S., Takanori H. Phys. Rev. B 2008, 78:054119.
42. http://astro-h.isas.jaxa.jp/si/02_e.html.
43. Swartz E.T., Pohl R.O. Rev. Mod. Phys. 1989, 61:605.
44. J. Goupy, C. Pigot, J. C. Villégier, J. L. Sauvageot, Patent: « Dispositif de connexion électrique multicouche de matériaux supraconducteurs entre deux circuits », N° 12 53890, (2012).
45. Thomsen C., Grahn H.T., Maris H.J., Tauc J. Phys. Rev. B 1986, 34:4129.
46. Rossignol C., Perrin B., Bonello B., Djemia P., Moch P., Hurdequint H. Phys. Rev. B 2004, 70:094102.
47. Belliard L., Huynh A., Perrin B., Michel A., Abadias G., Jaouen C. Phys. Rev. B 2009, 80:155424.
48. Djemia P., Ganot F., Moch P., Branger V., Goudeau P. J. Appl. Phys. 2001, 90:756.
49. Kueny A., Grimsditch M. Phys. Rev. B 1982, 26:4699.
50. Arshi N., Lu J., Joo Y.K., Lee C.G., Yoon J.H., Ahmed F. J. Mater. Sci. Mater. Electron. 2013, 24:1194.
51. Saoula N., Djerourou S., Yahiaoui K., Henda K., Kesri R., Erasmusand R.M., Comins J.D. Surf. Interface Anal. 2010, 42:1176.
52. Chan M.-H., Lu F.-H. Surf. Coat. Technol. 2012, 210:135.
53. Nagakura S., Kusunoki T., Kakimoto F., Hirotsu Y. J. Appl. Cryst. 1975, 8:65.
54. Toth L.E. Transition Metal Carbides and Nitrides 1971, Academic Press, New York.
55. Fark H., Chevallier J., Reichelt K., Dimigen H., Hübsch H. Thin Solid Films 1983, 100:193.
56. von Seefeld H., Cheung N.W., Maenpaa M., Nicolet M.-A. IEEE Trans. Electron Devices 1980, 27:873.
57. Armigliato A., Celotti G., Garulli A., Guerri S., Ostoja P., Rosa R., Martinelli G. Thin Solid Films 1982, 92:341.
58. Vissers M.R., Gao J., Wisbey D.S., Hite D.A., Tsuei C.C., Corcoles A.D., Steffen M., Pappas D.P. Appl. Phys. Lett. 2010, 97:232509.
59. Vissers M.R., Gao J., Kline J.S., Sandberg M., Weides M.P., Wisbey D.S., Pappas D.P. http://arXiv:1209.4626v1.
60. Leduc H.G., Bumble B., Day P.K., Eom B.H., Gao J., Golwala S., Mazin B.A., McHugh S., Merrill A., Moore D.C., Noroozian O., Turner A.D., Zmuidzinas J. Appl. Phys. Lett. 2010, 97:102509.
61. Ohya S., Chiaro B., Megrant A., Neill C., Barends R., Chen Y., Kelly J., Low D., Mutus J., O'Malley P.J.J., Roushan P., Sank D., Vainsencher A., Wenner J., White T.C., Yin Y., Schultz B.D., Palmstrøm C.J., Mazin B.A., Cleland A.N., Martinis John M. http://arXiv:1306.2966v1.
62. Faurie D., Djemia P., Le Bourhis E., Renault P.O., Roussigne Y., Cherif S.M., Brenner R., Castelnau O., Patriarche G., Goudeau Ph. Acta Mater. 2010, 58:4998.
63. Hill R. Proc. Phys. Soc. A 1952, 65:349.