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Volumn 515, Issue 17, 2007, Pages 6758-6764

Effect of tantalum addition on microstructure and optical properties of TiN thin films

Author keywords

Reflectance; Sputtering; Ta; TiN; Valence band

Indexed keywords

ATOMIC FORCE MICROSCOPY; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MAGNETRON SPUTTERING; MICROSTRUCTURE; OPTICAL PROPERTIES; REFLECTION; SURFACE ROUGHNESS; TANTALUM; TITANIUM NITRIDE; VALENCE BANDS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 34247573422     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.02.055     Document Type: Article
Times cited : (29)

References (18)
  • 10
    • 34247608028 scopus 로고
    • Lyman T. (Ed), American Society for Metals, Metals Park, Ohio
    • In: Lyman T. (Ed). Metals Handbook. Metallography, Structures and Phase Diagrams vol. 8 (1973), American Society for Metals, Metals Park, Ohio 336
    • (1973) Metallography, Structures and Phase Diagrams , vol.8 , pp. 336


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.