Mechanical properties and phase structure of (TiAlZr)N films deposited by multi arc ion plating

Thin Solid Films

Volumn 517, Issue 17, 2009, Pages 4830-4834

  Zhang, Jun ^a,b   Guo, Wenying ^a   Zhang, Yu ^c   Guo, Qiang ^a   Wang, Chuang ^a   Zhang, Lipeng ^a  

^a SHENYANG UNIVERSITY   (China)

^b State Key Laboratory for Materials Modification by Laser   (China)

^c UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

Author keywords

(Ti,Al,Zr)N; Adhesive strength; Cathodic arc ion plating; Hardness; Phase structure

Indexed keywords

(TI,AL,ZR)N; ADHESIVE PROPERTIES; ADHESIVE STRENGTH; ALLOY TARGET; ATOMIC RATIO; CATHODIC ARC ION PLATING; CRITICAL LOAD; DENSE COLUMNAR MICROSTRUCTURE; ELECTRONIC MICROSCOPES; FILM SURFACES; FRACTURE MICROSTRUCTURE; HARD FILMS; HIGH SPEED STEEL SUBSTRATE; LATTICE PARAMETERS; MICRO DROPLETS; MULTIARC ION PLATING; MULTICOMPONENT; SEM; SURFACE COMPOSITIONS; TI-AL-ZR ALLOYS; XRD ANALYSIS;

ALLOYS; ATOMS; CAVITY RESONATORS; HARDNESS; INDUSTRIAL APPLICATIONS; ION IMPLANTATION; MECHANICAL PROPERTIES; METALLIC FILMS; PHASE STRUCTURE; PLATING; SURFACE MORPHOLOGY; TARGETS; TITANIUM ALLOYS; TITANIUM NITRIDE; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; ZIRCONIUM; ZIRCONIUM ALLOYS;

ALUMINUM;

EID: 65749110919     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.03.051     Document Type: Article

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