SCOPUS 정보 검색 플랫폼

Volumn 2, Issue 1, 2014, Pages 98-108

A simple approach to the fabrication of fluorine-doped zinc oxide thin films by atomic layer deposition at low temperatures and an investigation into the growth mode

(2) Choi, Yong June a Park, Hyung Ho a

a Yonsei University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

FIELD EMISSION SCANNING ELECTRON MICROSCOPY; FLUORINE CONCENTRATIONS; LOW DEPOSITION TEMPERATURE; LOW-TEMPERATURE FABRICATION; OXYGEN-RELATED DEFECTS; STRUCTURAL AND MORPHOLOGICAL PROPERTIES; WIDE-ANGLE X-RAY DIFFRACTION; ZINC OXIDE THIN FILMS;

ATOMIC LAYER DEPOSITION; DEFECTS; DEIONIZED WATER; DEPOSITION; FIELD EMISSION MICROSCOPES; GRAIN GROWTH; OXYGEN; SEMICONDUCTOR DOPING; THIN FILMS; X RAY DIFFRACTION; ZINC OXIDE;

FLUORINE;

EID: 84889076570 PISSN: 20507534 EISSN: 20507526 Source Type: Journal
DOI: 10.1039/c3tc31478b Document Type: Article

Times cited : (79)

References (36)

1
- 0034247128
- D. S. Ginley C. Bright MRS Bull. 2000 25 15
- (2000) MRS Bull. , vol.25 , pp. 15
- Ginley, D.S.¹ Bright, C.²

2
- 33947714657
- E. Fortynato D. Ginley H. Hosono D. C. David MRS Bull. 2007 32 242
- (2007) MRS Bull. , vol.32 , pp. 242
- Fortynato, E.¹ Ginley, D.² Hosono, H.³ David, D.C.⁴

3
- 84877332652
- Y.-J. Choi S. C. Gong C.-S. Park H.-S. Lee J. G. Jang H. J. Chang G. Y. Yeom H.-H. Park ACS Appl. Mater. Interfaces 2013 5 3650
- (2013) ACS Appl. Mater. Interfaces , vol.5 , pp. 3650
- Choi, Y.-J.¹ Gong, S.C.² Park, C.-S.³ Lee, H.-S.⁴ Jang, J.G.⁵ Chang, H.J.⁶ Yeom, G.Y.⁷ Park, H.-H.⁸

4
- 79551654826
- D.-J. Lee H.-M. Kim J.-Y. Kwon H. Choi S.-H. Kim K.-B. Kim Adv. Funct. Mater. 2011 21 448
- (2011) Adv. Funct. Mater. , vol.21 , pp. 448
- Lee, D.-J.¹ Kim, H.-M.² Kwon, J.-Y.³ Choi, H.⁴ Kim, S.-H.⁵ Kim, K.-B.⁶

5
- 77954995384
- H. Serier A. Demourgues M. Gaudon Inorg. Chem. 2010 49 6853
- (2010) Inorg. Chem. , vol.49 , pp. 6853
- Serier, H.¹ Demourgues, A.² Gaudon, M.³

6
- 0031364609
- B. Sang A. Yamada M. Konagai Sol. Energy Mater. Sol. Cells 1997 49 19
- (1997) Sol. Energy Mater. Sol. Cells , vol.49 , pp. 19
- Sang, B.¹ Yamada, A.² Konagai, M.³

7
- 0026155850
- J. Hu R. G. Gordon Sol. Energy Mater. Sol. Cells 1991 30 437
- (1991) Sol. Energy Mater. Sol. Cells , vol.30 , pp. 437
- Hu, J.¹ Gordon, R.G.²

8
- 61849137694
- J. Rousset E. Saucedo D. Lincot Chem. Mater. 2009 21 534
- (2009) Chem. Mater. , vol.21 , pp. 534
- Rousset, J.¹ Saucedo, E.² Lincot, D.³

9
- 77957107783
- B. Liu M. Gu X. Liu S. Huang C. Ni Appl. Phys. Lett. 2010 97 122101
- (2010) Appl. Phys. Lett. , vol.97 , pp. 122101
- Liu, B.¹ Gu, M.² Liu, X.³ Huang, S.⁴ Ni, C.⁵

10
- 17944364471
- H. Y. Xu Y. C. Liu R. Mu C. L. Shao Y. M. Lu D. Z. Shen X. W. Fan Appl. Phys. Lett. 2005 86 123107
- (2005) Appl. Phys. Lett. , vol.86 , pp. 123107
- Xu, H.Y.¹ Liu, Y.C.² Mu, R.³ Shao, C.L.⁴ Lu, Y.M.⁵ Shen, D.Z.⁶ Fan, X.W.⁷

11
- 56949084894
- S. Ilican Y. Caglar M. Caglar F. Yakuphanoglu Appl. Surf. Sci. 2008 255 2353
- (2008) Appl. Surf. Sci. , vol.255 , pp. 2353
- Ilican, S.¹ Caglar, Y.² Caglar, M.³ Yakuphanoglu, F.⁴

12
- 0036680259
- M. L. Olvera A. Maldonado R. Asomoza Sol. Energy Mater. Sol. Cells 2002 73 425
- (2002) Sol. Energy Mater. Sol. Cells , vol.73 , pp. 425
- Olvera, M.L.¹ Maldonado, A.² Asomoza, R.³

13
- 78751643518
- L. Cao L. Zhu J. Jiang R. Zhao Z. Ye B. Zhao Sol. Energy Mater. Sol. Cells 2011 95 894
- (2011) Sol. Energy Mater. Sol. Cells , vol.95 , pp. 894
- Cao, L.¹ Zhu, L.² Jiang, J.³ Zhao, R.⁴ Ye, Z.⁵ Zhao, B.⁶

14
- 50249177010
- H. S. Yoon K. S. Lee B. Cheong D. K. Choi D. H. Kim W. M. Kim Sol. Energy Mater. Sol. Cells 2008 92 1366
- (2008) Sol. Energy Mater. Sol. Cells , vol.92 , pp. 1366
- Yoon, H.S.¹ Lee, K.S.² Cheong, B.³ Choi, D.K.⁴ Kim, D.H.⁵ Kim, W.M.⁶

15
- 34547325103
- T. Pilvi K. Arstila M. Leskela M. Ritala Chem. Mater. 2007 19 3387
- (2007) Chem. Mater. , vol.19 , pp. 3387
- Pilvi, T.¹ Arstila, K.² Leskela, M.³ Ritala, M.⁴

16
- 50249105843
- T. Pilvi E. Puukilainen U. Kreissig M. Leskelä M. Ritala Chem. Mater. 2008 20 5023
- (2008) Chem. Mater. , vol.20 , pp. 5023
- Pilvi, T.¹ Puukilainen, E.² Kreissig, U.³ Leskelä, M.⁴ Ritala, M.⁵

17
- 72949108714
- J.-S. Na Q. Peng G. Scarel G. N. Parson Chem. Mater. 2009 21 5585
- (2009) Chem. Mater. , vol.21 , pp. 5585
- Na, J.-S.¹ Peng, Q.² Scarel, G.³ Parson, G.N.⁴

18
- 0037465334
- J. W. Elam S. M. George Chem. Mater. 2003 15 1020
- (2003) Chem. Mater. , vol.15 , pp. 1020
- Elam, J.W.¹ George, S.M.²

19
- 77956336658
- P. Banerjee W.-J. Lee K.-R. Bae S. B. Lee G. W. Rubloff J. Appl. Phys. 2010 108 043504
- (2010) J. Appl. Phys. , vol.108 , pp. 043504
- Banerjee, P.¹ Lee, W.-J.² Bae, K.-R.³ Lee, S.B.⁴ Rubloff, G.W.⁵

20
- 33645504782
- A. Segura J. A. Sans D. Errandonea D. Martinez-García V. Fages Appl. Phys. Lett. 2006 88 011910
- (2006) Appl. Phys. Lett. , vol.88 , pp. 011910
- Segura, A.¹ Sans, J.A.² Errandonea, D.³ Martinez-García, D.⁴ Fages, V.⁵

21
- 56349089709
- S.-Y. Pung K.-L. Choy X. Hou C. Shan Nanotechnology 2008 19 435609
- (2008) Nanotechnology , vol.19 , pp. 435609
- Pung, S.-Y.¹ Choy, K.-L.² Hou, X.³ Shan, C.⁴

22
- 1842587440
- S.-H. Ko Park Y. E. Lee J. Mater. Sci. 2004 39 2195
- (2004) J. Mater. Sci. , vol.39 , pp. 2195
- Ko Park, S.-H.¹ Lee, Y.E.²

23
- 34247266634
- M. Berginski J. Hüpkes M. Schulte G. Schöpe H. Stiebig B. Rech J. Appl. Phys. 2007 101 074903
- (2007) J. Appl. Phys. , vol.101 , pp. 074903
- Berginski, M.¹ Hüpkes, J.² Schulte, M.³ Schöpe, G.⁴ Stiebig, H.⁵ Rech, B.⁶

24
- 0002081496
- K. Vanheusden W. L. Warren C. H. Seager D. R. Tallant J. A. Voigt B. E. Gnade J. Appl. Phys. 1996 79 7983
- (1996) J. Appl. Phys. , vol.79 , pp. 7983
- Vanheusden, K.¹ Warren, W.L.² Seager, C.H.³ Tallant, D.R.⁴ Voigt, J.A.⁵ Gnade, B.E.⁶

25
- 0000878717
- Y.-P. Wang W.-I. Lee T.-Y. Tseng Appl. Phys. Lett. 1996 69 1807
- (1996) Appl. Phys. Lett. , vol.69 , pp. 1807
- Wang, Y.-P.¹ Lee, W.-I.² Tseng, T.-Y.³

26
- 65749083710
- Y.-Z. Tsai N.-F. Wang C.-L. Tsai Mater. Lett. 2009 63 1621
- (2009) Mater. Lett. , vol.63 , pp. 1621
- Tsai, Y.-Z.¹ Wang, N.-F.² Tsai, C.-L.³

27
- 3242688221
- H. Y. Xu Y. C. Liu J. G. Ma Y. M. Luo Y. M. Lu D. Z. Shen J. Y. Zhang X. W. Gan R. Mu J. Phys.: Condens. Matter 2004 16 5143
- (2004) J. Phys.: Condens. Matter , vol.16 , pp. 5143
- Xu, H.Y.¹ Liu, Y.C.² Ma, J.G.³ Luo, Y.M.⁴ Lu, Y.M.⁵ Shen, D.Z.⁶ Zhang, J.Y.⁷ Gan, X.W.⁸ Mu, R.⁹

28
- 78651440370
- T. Wang P. V. Radovanovic J. Phys. Chem. C 2011 115 406
- (2011) J. Phys. Chem. C , vol.115 , pp. 406
- Wang, T.¹ Radovanovic, P.V.²

29
- 0034251416
- R. G. Gordon MRS Bull. 2000 25 52
- (2000) MRS Bull. , vol.25 , pp. 52
- Gordon, R.G.¹

30
- 22944444544
- S. T. Tan B. J. Chen X. W. Sun W. J. Fan H. S. Kwok X. H. Zhang S. J. Chua J. Appl. Phys. 2005 98 013505
- (2005) J. Appl. Phys. , vol.98 , pp. 013505
- Tan, S.T.¹ Chen, B.J.² Sun, X.W.³ Fan, W.J.⁴ Kwok, H.S.⁵ Zhang, X.H.⁶ Chua, S.J.⁷

31
- 33646202250
- E. Burstein Phys. Rev. Lett. 1954 93 632
- (1954) Phys. Rev. Lett. , vol.93 , pp. 632
- Burstein, E.¹

32
- 36048937855
- T. S. Moss Proc. Phys. Soc., London, Sect. B 1954 67 775
- (1954) Proc. Phys. Soc., London, Sect. B , vol.67 , pp. 775
- Moss, T.S.¹

33
- 77957827029
- H. Q. Le S. J. Lim G. K. L. Goh S. J. Chua J. Ong J. Electrochem. Soc. 2010 157 H196
- (2010) J. Electrochem. Soc. , vol.157 , pp. 196
- Le, H.Q.¹ Lim, S.J.² Goh, G.K.L.³ Chua, S.J.⁴ Ong, J.⁵

34
- 65649153407
- J. A. Sans J. F. Sánchez-Royo A. Segura G. Tobias E. Canadell Phys. Rev. B: Condens. Matter Mater. Phys. 2009 79 195105
- (2009) Phys. Rev. B: Condens. Matter Mater. Phys. , vol.79 , pp. 195105
- Sans, J.A.¹ Sánchez-Royo, J.F.² Segura, A.³ Tobias, G.⁴ Canadell, E.⁵

35
- 0001447933
- B. E. Sernelius K.-F. Berggren Z.-C. Jin I. Hamberg C. G. Granqvist Phys. Rev. B: Condens. Matter Mater. Phys. 1988 37 10244
- (1988) Phys. Rev. B: Condens. Matter Mater. Phys. , vol.37 , pp. 10244
- Sernelius, B.E.¹ Berggren, K.-F.² Jin, Z.-C.³ Hamberg, I.⁴ Granqvist, C.G.⁵

36
- 20844448381
- J. D. Ye S. L. Gu S. M. Zhu S. M. Liu Y. D. Zheng R. Zheng Y. Shi Appl. Phys. Lett. 2005 86 192111
- (2005) Appl. Phys. Lett. , vol.86 , pp. 192111
- Ye, J.D.¹ Gu, S.L.² Zhu, S.M.³ Liu, S.M.⁴ Zheng, Y.D.⁵ Zheng, R.⁶ Shi, Y.⁷

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.