High aspect ratio micromachining of glass by electrochemical discharge machining (ECDM)

Journal of Manufacturing Processes

Volumn 15, Issue 4, 2013, Pages 460-466

  Jui, Sumit K ^a   Kamaraj, Abishek B ^a   Sundaram, Murali M ^a  

^a 705 Engineering Research Center   (United States)

Author keywords

Electrochemical discharge machining; Glass; High aspect ratio; Micromachining

Indexed keywords

ELECTRO CHEMICAL DISCHARGE MACHINING; ELECTROLYTE CONCENTRATION; HIGH ASPECT RATIO; HIGH ASPECT RATIO MICROMACHINING; LOW ELECTROLYTE CONCENTRATION; MICRO-ACCELEROMETERS; MICRO-SYSTEM TECHNOLOGIES; MICROFLUIDIC COMPONENTS;

ASPECT RATIO; COMPOSITE MICROMECHANICS; ELECTRIC DISCHARGES; ELECTROLYTES; HOLE CONCENTRATION; MICROMACHINING; WEAR OF MATERIALS;

GLASS;

EID: 84888016170     PISSN: 15266125     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmapro.2013.05.006     Document Type: Article

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