ECDM methods for fluidic interfacing through thin glass substrates and the formation of spherical microcavities

Journal of Micromechanics and Microengineering

Volumn 17, Issue 2, 2007, Pages 403-409

  West, Jonathan ^a   Jadhav, Amol ^b  

^a LEIBNIZ INSTITUT FÜR ANALYTISCHE WISSENSCHAFTEN ISAS E V   (Germany)

^b NEWCASTLE UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; HEATING; INTERFACES (MATERIALS); MICROCAVITIES; MICROFLUIDICS; SUBSTRATES;

CAVITY MICROSTRUCTURES; ELECTROCHEMICAL DISCHARGE MACHINING (ECDM); GLASS SUBSTRATES; HOLE MACHINING;

MICROMACHINING;

EID: 34249023017     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/2/028     Document Type: Article

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