3D microstructuring of Pyrex glass using the electrochemical discharge machining process

Journal of Micromechanics and Microengineering

Volumn 17, Issue 5, 2007, Pages 960-966

  Zheng, Zhi Ping ^a   Cheng, Wei Hsin ^a   Huang, Fuang Yuan ^a   Yan, Biing Hwa ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGE MACHINING; ELECTRIC POTENTIAL; MICROSTRUCTURE; QUALITY ASSURANCE; THREE DIMENSIONAL;

COMPLEX STRUCTURES; ELECTROCHEMICAL DISCHARGE MACHINING (ECDM); MICROGROOVE MACHINING; PYREX GLASS;

GLASS MANUFACTURE;

EID: 34247515277     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/5/016     Document Type: Article

References (28)

1. Black I, Livingstone S A J and Chua K L 1998 A laser beam machining (LBM) database for the cutting of ceramic tile J. Mater. Process. Technol. 84 47-55
2. Choi G S and Choi G H 1997 Process analysis and monitoring in abrasive water jet machining of alumina ceramics Int. J. Mach. Tools Manuf. 37 295-307
3. Jia Z X, Zhang J H and Ai X 1995 Ultrasonic vibration pulse electro-discharge machining of holes in engineering ceramics J. Mater. Process. Technol. 53 811-6
4. Kurafuji H and Suda K 1968 Electrical discharge drilling of glass Ann. CIRP 16 415-9
5. Kubota M 1974 Proc. Int. Conf. Production Engineering (Tokyo) p 51
6. Langen H, Fascio V, Wüthrich R and Viquerat D 2002 Three-dimensional structuring of Pyrex glass devices? trajectory control Int. Conf. European Society for Precision Engineering and Nanotechnology (EUSPEN) (Eindhoven) vol 2 pp 435-8
7. Tandon S, Jain V K, Kumar P and Rajurkar K P 1990 Investigations into machining of composites Precis. Eng. 12 227-38
8. Bhattacharyya B, Doloi B N and Sorkhel S K 1999 Experimental investigations into electrochemical discharge machining (ECDM) of non-conductive ceramic materials J. Mater. Process. Technol. 95 145-54
9. Fascio V, Wüthrich R and Bleuler H 2004 Spark assisted chemical engraving in the light of electrochemistry Electrochim. Acta 49 3997-4003
10. Fascio V, Wüthrich R, Viquerat D and Langen H 1999 3D microstructuring of glass using electrochemical discharge machining (ECDM) Int. Symp. on Micromechatronics and Human Science (MHS '99) pp 179-83
11. Yang C T, Ho S S and Yan B H 2001 Micro hole machining of borosilicate glass trough electrochemical discharge machining (ECDM) Key Eng. Mater. 196 149-66
12. Kulkarni A, Sharan R and Lal G K 2002 An experimental study of discharge mechanism in electrochemical discharge machining Int. J. Mach. Tools Manuf. 42 1121-7
13. Wüthrich R, Spaelter U and Bleuler H 2006 The current signal in spark-assisted chemical engraving (SACE): what dose it tell us? J. Micromech. Microeng. 16 779-85
14. Wüthrich R and Fascio V 2005 Machining of non-conductive materials using electrochemical discharge phenomenon-an overview Int. J. Mach. Tools Manuf. 45 1095-108
15. Basak I and Ghosh A 1997 Mechanism of material removal in electrochemical discharge machining: a theoretical model and experimental verification J. Mater. Process. Technol. 71 350-9
16. Basak I and Ghosh A 1996 Mechanism of spark generation during electrochemical discharge machining: a theoretical model and experimental verification J. Mater. Process. Technol. 62 46-53
17. Wüthrich R, Spaelter U, Wu Y and Bleuler H 2006 A systematic characterization method for gravity-feed micro-hole drilling in glass with spark assisted chemical engraving (SACE) J. Micromech. Microeng. 16 1891-6
18. Wüthrich R, Hof L A, Lal A, Fujisaki K, Bleuler H, Mandin Ph and Picard G 2005 Physical principles and miniaturization of spark assisted chemical engraving (SACE) J. Micromech. Microeng. 15 S268-75
19. Wüthrich R and Hof L A 2006 The gas film in spark assisted chemical engraving (SACE)-A key element for micro-machining application Int. J. Mach. Tools Manuf. 46 825-35
20. Gautam N and Jain V K 1998 Experimental investigations into ECSD process using various tool kinematics Int. J. Mach. Tools Manuf. 38 15-27
21. Wüthrich R, Despont B, Maillard P and Bleuler H 2006 Improving the material removal rate in spark-assisted chemical engraving (SACE) gravity-feed micro-hole drilling by tool vibration J. Micromech. Microeng. 16 N28-N31
22. Kim D J, Ahn Y, Lee S H and Kim Y K 2006 Voltage pulse frequency and duty ratio effects in an electrochemical discharge microdrilling process of Pyrex glass Int. J. Mach. Tools Manuf. 46 1064-7
23. Zheng Z P, Su H C, Huang F Y and Yan B H 2007 The tool geometrical shape and pulse-off time of pulse voltage effects in a Pyrex glass electrochemical discharge microdrilling process J. Micromech. Microeng. 17 265-72
24. Langen H, Breguet J M, Bleuler H, Renaud Ph and Masuzawa T 1998 Micro electrochemical discharge machining of glass Int. J. Electr. Mach. 3 65-9
25. Wüthrich R, Fascio V, Viquerat D and Langen H 1999 In situ measurement and micromachining of glass Int. Symp. on Micromechatronics and Human Science (MHS '99) pp 185-91
26. Lee E S, Howard D, Liang E, Collins S D and Smith R L 2004 Removable tubing interconnects for glass-based micro-fluidic systems made using ECDM J. Micromech. Microeng. 14 535-41
27. Masuzawa T, Fujino M, Kobayashi K and Suzuki T 1985 Wire electro discharge grinding for micromachining Ann. CIRP 34 431
28. Wüthrich R, Fascio V, Viquerat D and Langen H 2002 Study of spark assisted chemical engraving? Process technology date Int. Conf. of the European Society for Precision Engineering and Nanotechnology pp 265-8