In situ measurement and micromachining of glass

Proceedings of the International Symposium on Micro Machine and Human Science

Volumn , Issue , 1999, Pages 185-191

  Wuthrich, Rolf ^a   Fascio, Valia ^a   Viquerat, Didier ^a   Langen, Hans ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; DRILLING; ELECTROCHEMISTRY; GLASS; SUBSTRATES;

ELECTROCHEMICAL DISCHARGE MACHINING;

MICROMACHINING;

EID: 0033313374     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)