메뉴 건너뛰기




Volumn 32, Issue 12, 2012, Pages 3229-3238

Processing of Foturan ® glass ceramic substrates for micro-solid oxide fuel cells

Author keywords

Foturan ; HF etching; Micro device; Micro solid oxide fuel cell; Photostructurable glass ceramic

Indexed keywords

ACID SOLUTIONS; CERAMIC SUBSTRATES; ETCHING RATE; HF ETCHING; LINEAR RATE; MAXIMUM POWER DENSITY; MICRO DEVICES; OXIDE FUEL CELLS; PHOTOSTRUCTURABLE GLASS CERAMICS; POTENTIAL SUBSTRATE; PT ANODES; PT CATHODE;

EID: 84862492427     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2012.04.006     Document Type: Article
Times cited : (34)

References (42)
  • 4
    • 48349112056 scopus 로고    scopus 로고
    • Solid oxide fuel cell membranes supported by nickel grid anode
    • Rey-Mermet S., Muralt P. Solid oxide fuel cell membranes supported by nickel grid anode. Solid State Ionics 2008, 179(27-32):1497-1500.
    • (2008) Solid State Ionics , vol.179 , Issue.27-32 , pp. 1497-1500
    • Rey-Mermet, S.1    Muralt, P.2
  • 5
    • 84862495462 scopus 로고    scopus 로고
    • Graduating thesis, Lausanne, Switzerland: EPF Lausanne.
    • Rey-Mermet S. Graduating thesis, Lausanne, Switzerland: EPF Lausanne; 2008. p. 169.
    • (2008) , pp. 169
    • Rey-Mermet, S.1
  • 6
    • 45449095455 scopus 로고    scopus 로고
    • Simple fabrication of micro-solid oxide fuel cell supported on metal substrate
    • Joo J.H., Choi G.M. Simple fabrication of micro-solid oxide fuel cell supported on metal substrate. J Power Sources 2008, 182(2):589-593.
    • (2008) J Power Sources , vol.182 , Issue.2 , pp. 589-593
    • Joo, J.H.1    Choi, G.M.2
  • 7
    • 84862492095 scopus 로고    scopus 로고
    • Fabrication of thin film SOFC by using AAO as electrode template. In: Lucerne fuel cell forum
    • Kwon C-W, et al. Fabrication of thin film SOFC by using AAO as electrode template. In: Lucerne fuel cell forum. Lucerne; 2008.
    • (2008) Lucerne
    • Kwon, C.-W.1
  • 8
    • 61449191976 scopus 로고    scopus 로고
    • Solid oxide fuel cell with corrugated thin film electrolyte
    • Su P.C., Chao C.C., Shim J.H., Fasching R., Prinz F.B. Solid oxide fuel cell with corrugated thin film electrolyte. Nano Lett 2008, 8(8):2289-2292.
    • (2008) Nano Lett , vol.8 , Issue.8 , pp. 2289-2292
    • Su, P.C.1    Chao, C.C.2    Shim, J.H.3    Fasching, R.4    Prinz, F.B.5
  • 9
    • 34547653583 scopus 로고    scopus 로고
    • Atomic layer deposition of yttria-stabilized zirconia for solid oxide fuel cells
    • Shim J.H., Chao C.C., Huang H., Prinz F.B. Atomic layer deposition of yttria-stabilized zirconia for solid oxide fuel cells. Chem Mater 2007, 19(15):3850-3854.
    • (2007) Chem Mater , vol.19 , Issue.15 , pp. 3850-3854
    • Shim, J.H.1    Chao, C.C.2    Huang, H.3    Prinz, F.B.4
  • 10
    • 32044462910 scopus 로고    scopus 로고
    • Thin-film solid oxide fuel cells on porous nickel substrates with multistage nanohole array
    • Kang S., Su P.C., Park Y.I., Saito Y., Prinz F.B. Thin-film solid oxide fuel cells on porous nickel substrates with multistage nanohole array. J Electrochem Soc 2006, 153(3):A554-A559.
    • (2006) J Electrochem Soc , vol.153 , Issue.3
    • Kang, S.1    Su, P.C.2    Park, Y.I.3    Saito, Y.4    Prinz, F.B.5
  • 11
  • 13
    • 70350327893 scopus 로고    scopus 로고
    • Microstructure and microfabrication considerations for self-supported on-chip ultra-thin micro-solid oxide fuel cell membranes
    • Lai B.K., Xiong H., Tsuchiya M., Johnson A.C., Ramanathan S. Microstructure and microfabrication considerations for self-supported on-chip ultra-thin micro-solid oxide fuel cell membranes. Fuel Cells 2009, 9(5):699-710.
    • (2009) Fuel Cells , vol.9 , Issue.5 , pp. 699-710
    • Lai, B.K.1    Xiong, H.2    Tsuchiya, M.3    Johnson, A.C.4    Ramanathan, S.5
  • 14
    • 57949091573 scopus 로고    scopus 로고
    • An experimental investigation into micro-fabricated solid oxide fuel cells with ultra-thin La(0.6)Sr(0.4)Co(0.8)Fe(0.2)O(3) cathodes and yttria-doped zirconia electrolyte films
    • Johnson A.C., Lai B.K., Xiong H., Ramanathan S. An experimental investigation into micro-fabricated solid oxide fuel cells with ultra-thin La(0.6)Sr(0.4)Co(0.8)Fe(0.2)O(3) cathodes and yttria-doped zirconia electrolyte films. J Power Sources 2009, 186(2):252-260.
    • (2009) J Power Sources , vol.186 , Issue.2 , pp. 252-260
    • Johnson, A.C.1    Lai, B.K.2    Xiong, H.3    Ramanathan, S.4
  • 15
    • 77649342304 scopus 로고    scopus 로고
    • Electrical characterization of thermomechanically stable YSZ membranes for micro solid oxide fuel cells applications
    • Garbayo I., Tarancón A., Santiso J., Peiró F., Alarcón-Lladó E., Cavallaro A., et al. Electrical characterization of thermomechanically stable YSZ membranes for micro solid oxide fuel cells applications. Solid State Ionics 2010, 181(5-7):322-331.
    • (2010) Solid State Ionics , vol.181 , Issue.5-7 , pp. 322-331
    • Garbayo, I.1    Tarancón, A.2    Santiso, J.3    Peiró, F.4    Alarcón-Lladó, E.5    Cavallaro, A.6
  • 16
  • 17
    • 0018021495 scopus 로고
    • Microstructure of glass ceramics and photosensitive glasses
    • Beall G.H. Microstructure of glass ceramics and photosensitive glasses. Glass Technol 1978, 19(5):109-113.
    • (1978) Glass Technol , vol.19 , Issue.5 , pp. 109-113
    • Beall, G.H.1
  • 18
    • 0029732554 scopus 로고    scopus 로고
    • Fabrication technologies for microsystems utilizing photoetchable glass
    • Dietrich T.R., Ehrfeld W., Lacher M., Kramer M., Speit B. Fabrication technologies for microsystems utilizing photoetchable glass. Microelectron Eng 1996, 30(1-4):497-504.
    • (1996) Microelectron Eng , vol.30 , Issue.1-4 , pp. 497-504
    • Dietrich, T.R.1    Ehrfeld, W.2    Lacher, M.3    Kramer, M.4    Speit, B.5
  • 20
    • 70350714746 scopus 로고    scopus 로고
    • Yttria-stabilized zirconia thin films by pulsed laser deposition: microstructural and compositional control
    • Heiroth S., Lippert T., Wokaun A., Dobeli M., Rupp J.L.M., Scherrer B. Yttria-stabilized zirconia thin films by pulsed laser deposition: microstructural and compositional control. J Eur Ceram Soc 2010, 30(2):489-495.
    • (2010) J Eur Ceram Soc , vol.30 , Issue.2 , pp. 489-495
    • Heiroth, S.1    Lippert, T.2    Wokaun, A.3    Dobeli, M.4    Rupp, J.L.M.5    Scherrer, B.6
  • 21
    • 11144238601 scopus 로고    scopus 로고
    • Thermal expansion coefficient of yttria stabilized zirconia for various yttria contents
    • Hayashi H., Saitou T., Maruyama N., Inaba H., Kawamura K., Mori M. Thermal expansion coefficient of yttria stabilized zirconia for various yttria contents. Solid State Ionics 2005, 176(5-6):613-619.
    • (2005) Solid State Ionics , vol.176 , Issue.5-6 , pp. 613-619
    • Hayashi, H.1    Saitou, T.2    Maruyama, N.3    Inaba, H.4    Kawamura, K.5    Mori, M.6
  • 22
    • 54549113343 scopus 로고    scopus 로고
    • Microstructure and electrical conductivity of YSZ thin films prepared by pulsed laser deposition
    • Heiroth S., Lippert T., Wokaun A., Döbeli M. Microstructure and electrical conductivity of YSZ thin films prepared by pulsed laser deposition. Appl Phys A: Mater Sci Process 2008, 93:639-643.
    • (2008) Appl Phys A: Mater Sci Process , vol.93 , pp. 639-643
    • Heiroth, S.1    Lippert, T.2    Wokaun, A.3    Döbeli, M.4
  • 23
    • 22244441430 scopus 로고    scopus 로고
    • Microreactors and microreaction systems for development and production
    • Dietrich T.R., Freitag A., Scholz R. Microreactors and microreaction systems for development and production. MST News 2002, 3:12-14.
    • (2002) MST News , vol.3 , pp. 12-14
    • Dietrich, T.R.1    Freitag, A.2    Scholz, R.3
  • 24
    • 2542460280 scopus 로고    scopus 로고
    • Production and properties of glass microreactors
    • Dietrich T.R., Freitag A., Scholz R. Production and properties of glass microreactors. Chem Ing Tech 2004, 76(5):575-580.
    • (2004) Chem Ing Tech , vol.76 , Issue.5 , pp. 575-580
    • Dietrich, T.R.1    Freitag, A.2    Scholz, R.3
  • 25
    • 73249136715 scopus 로고    scopus 로고
    • Wet-etching of precipitation-based thin film microstructures for micro-solid oxide fuel cells
    • Rupp J.L.M., Muecke U.P., Nalam P.C., Gauckler L.J. Wet-etching of precipitation-based thin film microstructures for micro-solid oxide fuel cells. J Power Sources 2010, 195(9):2669-2676.
    • (2010) J Power Sources , vol.195 , Issue.9 , pp. 2669-2676
    • Rupp, J.L.M.1    Muecke, U.P.2    Nalam, P.C.3    Gauckler, L.J.4
  • 26
    • 79956356131 scopus 로고    scopus 로고
    • The impact of etching during microfabrication on the microstructure and the electrical conductivity of gadolinia-doped ceria thin films
    • Bieberle-Hütter A., Reinhard P., Rupp J.L.M., Gauckler L.J. The impact of etching during microfabrication on the microstructure and the electrical conductivity of gadolinia-doped ceria thin films. J Power Sources 2011, 196(15):6070-6078.
    • (2011) J Power Sources , vol.196 , Issue.15 , pp. 6070-6078
    • Bieberle-Hütter, A.1    Reinhard, P.2    Rupp, J.L.M.3    Gauckler, L.J.4
  • 28
    • 0026412812 scopus 로고
    • Glasses and glass-ceramics for application in micromechanics
    • Hulsenberg D., Bruntsch R. Glasses and glass-ceramics for application in micromechanics. J Non-Cryst Solids 1991, 129(1-3):199-205.
    • (1991) J Non-Cryst Solids , vol.129 , Issue.1-3 , pp. 199-205
    • Hulsenberg, D.1    Bruntsch, R.2
  • 29
    • 84862492098 scopus 로고
    • Graduating thesis. Illmenau, Germany: Illmenau Institute of Technology, Technical University of Illmenau.
    • Lukat D. Graduating thesis. Illmenau, Germany: Illmenau Institute of Technology, Technical University of Illmenau; 1988.
    • (1988)
    • Lukat, D.1
  • 30
    • 84862495463 scopus 로고
    • Graduating thesis. In: Illmenau Institute of Technology: Illmenau, Germany.
    • Brokmann U. Graduating thesis. In: Illmenau Institute of Technology: Illmenau, Germany; 1990.
    • (1990)
    • Brokmann, U.1
  • 31
    • 41149162109 scopus 로고    scopus 로고
    • Aspect ratios, sizes, and etch rates in photostructurable glass-ceramic
    • [art. no. 68820J]
    • Stillman J., Judy J., Helvajian H. Aspect ratios, sizes, and etch rates in photostructurable glass-ceramic. Micromach Microfabric Process Technol xiii 2008, 6882:J8820. [art. no. 68820J].
    • (2008) Micromach Microfabric Process Technol xiii , vol.6882
    • Stillman, J.1    Judy, J.2    Helvajian, H.3
  • 34
    • 0002882528 scopus 로고
    • Design and properties of glass-ceramics
    • Beall G.H. Design and properties of glass-ceramics. Annu Rev Mater Sci 1992, 22:91-119.
    • (1992) Annu Rev Mater Sci , vol.22 , pp. 91-119
    • Beall, G.H.1
  • 37
    • 44949158786 scopus 로고    scopus 로고
    • Laser alteration of the mechanical properties of photostructurable glass-ceramic
    • [art. no. 68790E]
    • Stillman J., Judy J., Helvajian H. Laser alteration of the mechanical properties of photostructurable glass-ceramic. Photon Process Microelectron Photonics vii 2008, 6879:E8790. [art. no. 68790E].
    • (2008) Photon Process Microelectron Photonics vii , vol.6879
    • Stillman, J.1    Judy, J.2    Helvajian, H.3
  • 38
    • 0038334102 scopus 로고    scopus 로고
    • Influence of UV-laser parameters on geometrical structuring of photosensitive glass
    • Brokmann U., Harnisch A., Hulsenberg D. Influence of UV-laser parameters on geometrical structuring of photosensitive glass. Materialwiss Werkstofftech 2003, 34(7):666-670.
    • (2003) Materialwiss Werkstofftech , vol.34 , Issue.7 , pp. 666-670
    • Brokmann, U.1    Harnisch, A.2    Hulsenberg, D.3
  • 40
    • 79551655261 scopus 로고    scopus 로고
    • Microscopic and nanoscopic three-phase-boundaries of platinum thin-film electrodes on YSZ electrolyte
    • Ryll T., Galinski H., Schlagenhauf L., Elser P., Rupp J.L.M., Bieberle-Hutter A., et al. Microscopic and nanoscopic three-phase-boundaries of platinum thin-film electrodes on YSZ electrolyte. Adv Funct Mater 2011, 21(3):565-572.
    • (2011) Adv Funct Mater , vol.21 , Issue.3 , pp. 565-572
    • Ryll, T.1    Galinski, H.2    Schlagenhauf, L.3    Elser, P.4    Rupp, J.L.M.5    Bieberle-Hutter, A.6
  • 42
    • 75149124324 scopus 로고    scopus 로고
    • Porous model type electrodes by induced dewetting of thin Pt films on YSZ substrates
    • Baumann N., Mutoro E., Janek J. Porous model type electrodes by induced dewetting of thin Pt films on YSZ substrates. Solid State Ionics 2009, 181(1-2):7-15.
    • (2009) Solid State Ionics , vol.181 , Issue.1-2 , pp. 7-15
    • Baumann, N.1    Mutoro, E.2    Janek, J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.