The tool geometrical shape and pulse-off time of pulse voltage effects in a Pyrex glass electrochemical discharge microdrilling process

Journal of Micromechanics and Microengineering

Volumn 17, Issue 2, 2007, Pages 265-272

  Zheng, Zhi Ping ^a   Su, Hsin Chuan ^b   Huang, Fuang Yuan ^a   Yan, Biing Hwa ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DRILLING; ELECTRIC DISCHARGES; ELECTROCHEMISTRY; MICROELECTRODES; MICROMACHINING; VOLTAGE CONTROL;

ELECTROCHEMICAL DISCHARGE MACHINING (ECDM); GLASS WAFERS; HEAT-AFFECTED ZONE; MICRODRILLING;

GLASS;

EID: 34247529375     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/2/012     Document Type: Article

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