Dark-field imaging of thin specimens with a forescatter electron detector at low accelerating voltage

Microscopy and Microanalysis

Volumn 19, Issue 6, 2013, Pages 1688-1697

  Brodusch, Nicolas ^a   Demers, Hendrix ^a   Gauvin, Raynald ^a  

^a MCGILL UNIVERSITY   (Canada)

Author keywords

dark field (DF); forescatter electron detector (FSED); Monte Carlo simulations; scanning electron microscopy (SEM); scanning transmission electron microscopy (STEM); transmission electron forward scatter diffraction (t EFSD); transmitted electrons detector (TED)

Indexed keywords

EID: 84887887532     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927613013287     Document Type: Article

References (38)

1. BRODUSCH, N., DEMERS, H. & GAUVIN, R. (2013). Nanometers-resolution Kikuchi patters from materials science specimens with transmission electron forward scatter diffraction in the scanning electron microscope. J Microsc 250(1), 1-14.
2. BRODUSCH, N., TRUDEAU, M., MICHAUD, P., RODRIGUE, L., BOSELLI, J. & GAUVIN, R. (2012). Contribution of a new generation FE-SEM in the understanding of a 2099 Al-Li alloy. Microsc Microanal 18(6), 1393-1409.
3. COWLEY, J.M. & HUANG, Y. (1992). De-channelling contrast in annular dark-field STEM. Ultramicroscopy 40(2), 171-180.
4. CRAWFORD, B.J. & LILEY, C.R.W. (1970). A simple transmission stage using the standard collection system in the scanning electron microscope. J Phys E: Sci Instrum 3, 461-462.
5. DEMERS, H., POIRIER-DEMERS, N., DROUIN, D. & DE JONGE, N. (2010). Simulating STEM imaging of nanoparticles in micrometers-thick substrates. Microsc Microanal 16(6), 795-804.
6. DEMERS, H., POIRIER-DEMERS, N., RÉAL COUTURE, A., JOLY, D., GUILMAIN, M., DE JONGE, N. & DROUIN, D. (2011). Three-dimensional electron microscopy simulation with the Casino Monte Carlo software. Scanning 33(3), 135-146.
7. FORBES, B.D., D'ALFONSO, A.J., FINDLAY, S.D., VAN DYCK, D., LEBEAU, J.M., STEMMER, S. & ALLEN, L.J. (2011). Thermal diffuse scattering in transmission electron microscopy. Ultra-microscopy 111(12), 1670-1680.
8. GIUMMARRA, C., THOMAS, B. & RIOJA, R.J. (2007). New aluminum lithium alloys for aerospace applications. In Proceedings of the Third International Conference on Light Metals Technology, Sa-dayappan, K. & Sahoo, M. (Eds.). Ottawa, Ontario, Canada: CANMET.
9. GUISE, O., STROM, C. & PRESCILLA, N. (2008). Evaluation of STEM-in-SEM vs. TEM for polymer applications in an industrial setting. Microsc Microanal 14(S2), 678-679.
10. HALVARSSON, M., JONSSON, T. & CANOVIC, S. (2008). Thin foil analysis in the SEM. J Phys: Conf Ser 126, 012075.
11. HARUTA, M., KOMATSU, H., KURATA, H., AZUMA, M., SHIMAKAWA, Y. & ISODA, S. (2008). Effects of electron channeling in HAADF intensity. In EMC 2008 14th European Microscopy Congress 1-5 September 2008, Luysberg, M., Tillmann, K. & Weirich, T. (Eds.), pp. 117-118. Berlin: Springer.
12. HONDOW, N., HARRINGTON, J., BRYDSON, R., DOAK, S.H., SINGH, N., MANSHIAN, B. & BROWN, A. (2011). STEM mode in the SEM: A practical tool for nanotoxicology. Nanotoxicology 5(2), 215-217.
13. HOWIE, A. (1979). Image contrast and localized signal selection techniques. J Microsc 117(Pt 1), 11-23.
14. HOYLE, D., MALAC, M., TRUDEAU, M. & WO O, P. (2011). UV treatment of electron microscope samples for reduced hydrocarbon contamination. In MSC-SMC 2011, 38th Annual Meeting, Geitmann, A. (Ed.), pp. 35-36. Ottawa, Ontario, Canada: Microscopical Society of Canada.
15. JESSON, D.E. & PENNYCOOK, S.J. (1995). Incoherent imaging of crystals using thermally scattered electrons. In P Roy Soc Lond Ser-A 449, 273-293.
16. JOY, D.C. (2002). SMART-A program to measure SEM resolution and imaging performance. J Microsc 208, 24-34.
17. KAISER, U., BISKUPEK, J., MEYER, J.C., LESCHNER, J., LESCHNER, L., ROSE, H., STÖGER-POLLACH, M., KHLOBYSTOV, A.N., HARTEL, P., MÜLLER, H., HAIDER, M., EYHUSEN, S. & BENNER, G. (2011). Transmission electron microscopy at 20 kV for imaging and spectroscopy. Ultramicroscopy 111(8), 1239-1246.
18. KELLER, R.R. & GEISS, R.H. (2012). Transmission EBSD from 10 nm domains in a scanning electron microscope. J Microsc 245(Pt 3), 245-251.
19. LEE, M.R. & SMITH, C.L. (2006). Scanning transmission electron microscopy using a SEM: Applications to mineralogy and petrology. Mineral Mag 70(5), 579-590.
20. MALIS, T., CHENG, S.C. & EGERTON, R.F. (1988). EELS log-ratio technique for specimen-thickness measurement in the TEM. J Electron Microsc Tech 8(2), 193-200.
21. MERLI, P.G., CORTICELLI, F. & MORANDI, V. (2002). Images of dopant profiles in low-energy scanning transmission electron microscopy. Appl Phys Lett 81(24), 4535-4537.
22. MERLI, P.G., MIGLIORI, A., NACUCCHI, M. & VITTORI ANTISARI, M. (1996). Comparison of spatial resolutions obtained with different signals components in scanning electron microscopy. Ultramicroscopy 65(1), 23-30.
23. MERLI, P.G. & MORANDI, V. (2005). Low-energy STEM of multilayers and dopant profiles. Microsc Microanal 11(1), 97-104.
24. MERLI, P.G., MORANDI, V. & CORTICELLI, F. (2003). Backscattered electron imaging and scanning transmission electron microscopy imaging of multi-layers. Ultramicroscopy 94(1), 89-98.
25. MORANDI, V. & MERLI, P.G. (2007a). Contrast and resolution versus specimen thickness in low energy scanning transmission electron microscopy. J Appl Phys 101(11), 114917.
26. MORANDI, V. & MERLI, P.G. (2007b). Scanning electron microscopy of thinned specimens: From multilayers to biological samples. Appl Phys Lett 90(16), 163113.
27. MORIKAWA, A., KAMIYA, C., WATANABE, S., NAKAGAWA, M. & ISHITANI, T. (2006). Low-voltage dark-field STEM imaging with optimum detection angle. Microsc Microanal 12(Suppl 2), 1368-1369.
28. PROBST, C., DEMERS, H. & GAUVIN, R. (2012). Spatial resolution optimization of backscattered electron images using Monte Carlo simulation. Microsc Microanal 18(3), 628-637.
29. REIMER, L. (1998). Scanning Electron Microscopy-Physics of Image Formation and Microanalysis. Berlin, New York: Springer.
30. REIMER, L. & KOHL, H. (2008). Specimen damage by electron irradiation. In Transmission Electron Microscopy: Physics of Image Formation, Reimer, L. (Ed.), pp. 459-490. Berlin, New York: Springer.
31. ROSE, A. (1948). Television pickup tubes and the problem of noise. Adv Electron 1, 131-166.
32. SOONG, C., WOO, P. & HOYLE, D. (2012). Contamination cleaning of TEM/SEM samples with the ZONE cleaner. Microsc Today 20(6), 44-48.
33. SUNAOSHI, T., ORAI, Y., ITO, H. & OGASHIWA, T. (2012). 30 kV STEM imaging with lattice resolution using a high resolution cold FE-SEM. Available at http://emc2012.org.uk/congressblog/.
34. SUSSMAN, M. & DEMOPOULOS, G.P. (2012). Novel fabrication of highly conductive titania/carbon electrodes for lithium-ion batteries and supercapacitors. ECS Meeting Abstracts, Honolulu, Hawaï PRIME 2012, p. 653.
35. THONG, J.T.L., SIM, K.S. & PHANG, J.C.H. (2001). Single-image signal-to-noise ratio estimation. Scanning 23, 328-336.
36. TRIMBY, P.W. (2012). Orientation mapping of nanostructured materials using transmission Kikuchi diffraction in the scanning electron microscope. Ultramicroscopy 120, 16-24.
37. VAN NGO, V., HERNANDEZ, M., ROTH, B. & JOY, D.C. (2007). STEM imaging of lattice fringes and beyond in a UHR in-lens field-emission SEM. Microsc Today 15(2), 12-16.
38. YU, Z., MULLER, D.A. & SILCOX, J. (2008). Effects of specimen tilt in ADF-STEM imaging of a-Si/c-Si interfaces. Ultramicroscopy 108(5), 494-501.