Comparison of spatial resolutions obtained with different signal components in scanning electron microscopy

Ultramicroscopy

Volumn 65, Issue 1-2, 1996, Pages 23-30

  Merli, P G ^a   Migliori, A ^a   Nacucchi, M ^b   Vittori Antisari, M ^c  

^a CNR   (Italy)

^b Centro Nazionale per la Ricerca e lo Sviluppo dei Materiali   (Italy)

^c ENEA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BACKSCATTERING; ELECTRON MICROSCOPES; ELECTRON SCATTERING; OPTICAL RESOLVING POWER;

COMPOSITIONAL CONTRAST; EVERHART-THORNLEY DETECTOR;

SCANNING ELECTRON MICROSCOPY;

ARTICLE; INTERMETHOD COMPARISON; OPTICAL RESOLUTION; SCANNING ELECTRON MICROSCOPY;

MICROSCOPY, ELECTRON, SCANNING;

EID: 0030250302     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(96)00053-8     Document Type: Article

References (9)

1. [1] D.C. Joy and J.B. Pawley, Ultramicroscopy 47 (1992) 80.
2. [2] L. Reimer, Scanning Electron Microscopy (Springer, Berlin, 1985).
3. [3] D.C. Joy, J. Microscopy 161 (1991) 343.
4. [4] P.G. Merli, A. Migliori, M. Nacucchi, D. Govoni and G. Mattei, Ultramicroscopy 60 (1995) 229.
5. [5] P.G. Merli and M. Nacucchi, Ultramicroscopy 50 (1993) 83.
6. [6] B.J. Crawford and C.R.W. Liley, J. Phys. E: Sci. Instrum, 3 (1970) 461
7. [7] G.T. Mearini, I. L. Krainsky, J.A. Dayton, Jr., Y. Wang, C.A. Zorman, J.C. Angus, R.W. Hoffman and D.F. Anderson, Appl. Phys. Lett. 66(2) (1995) 242
8. [8] D. Govoni, P.G. Merli, A. Migliori and M. Nacucchi, Microsc. Microanal. Microstruct. 6 (1995) 489.
9. [9] W. Baumann and L. Reimer, Scanning 4 (1981) 141.