Backscattered electron imaging and scanning transmission electron microscopy imaging of multi-layers

Ultramicroscopy

Volumn 94, Issue 2, 2003, Pages 89-98

  Merli, P G ^a   Morandi, V ^b   Corticelli, F ^a  

^a CNR   (Italy)

^b UNIVERSITY OF BOLOGNA   (Italy)

Author keywords

Backscattered electrons imaging; Scanning electron microscopy; Scanning transmission electron microscopy

Indexed keywords

DENSITY (OPTICAL); ELECTROMAGNETIC WAVE BACKSCATTERING; ELECTRON BEAMS; IMAGE ANALYSIS; SCANNING ELECTRON MICROSCOPY;

BACKSCATTERED ELECTRON IMAGING;

MICROSCOPIC EXAMINATION;

ARTICLE; DENSITY; ELECTRON BEAM; SAMPLE SIZE; SCANNING ELECTRON MICROSCOPY; SCANNING TRANSMISSION ELECTRON MICROSCOPY; SIMULATION;

EID: 0347927626     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(02)00217-6     Document Type: Article

References (21)

1. R.P. Feynman, Talk at the annual meeting of the American Physical Society at Caltech on December 29th 1959, published in the Caltech's Engineering and Science (February 1960 issue), in: H.D. Gilbert (Ed.), Microminiaturization, Reinhold Publishing Corporation, New York, 1961, available at http://www.zyvex.com/nanotech/feynman.html.
2. Merli P.G., Migliori A., Morandi V., Rosa R. Ultramicroscopy. 88:2001;139.
3. K. Ogura, M.M. Kersker, Proceedings of the 46th EMSA Meeting, 1988, p. 204.
4. S. Franchi, P.G. Merli, A. Migliori, K. Ogura, A. Ono, Proceedings of the 12th ICEM, Vol. 1, 1990, p. 380.
5. Merli P.G., Nacucchi M. Ultramicroscopy. 50:1993;83.
6. Perovic D.D., Castell M.R., Howie A., Lavoie C., Tiedje T., Cole J.S.W. Ultramicroscopy. 58:1995;104.
7. Merli P.G., Migliori A., Nacucchi M., Govoni D., Mattei G. Ultramicroscopy. 60:1995;83.
8. Merli P.G., Migliori A., Nacucchi M., Vittori Antisari M. Ultramicroscopy. 65:1996;23.
9. O.C. Wells, M. Nacucchi, in: P.G. Merli, M. Vittori Antisari (Eds.), Proceedings of the International School on Electron Microscopy in Materials Science, World Scientific, Singapore, 1992, p. 479.
10. K. Murata, M. Yasuda, H. Kavata, IITRI/SEM 943,1992.
11. Yasuda M., Kavata H., Murata K. J. Appl. Phys. 77:1995;4076.
12. Yasuda M., Kavata H., Murata K. Phys. Stat. Sol. A. 152:1996;113.
13. Reimer L. Scanning Electron Microscopy. 1998;Springer, New York.
14. Liu J. Microscopy and Microanalysis. 6:2000;388.
15. H.W. Zanbergen, C. Thoeholt, in: S. Amelincks, D. Van Dyck, J. Van Landuyt, G. Van Tendeloo (Eds.), Handbook of Microscopy, Vol. 3, VCH, New York, 1997, p. 691.
16. Konkol A., Wilshaw P.R., Booker G.R. Ultramicroscopy. 55:1994;183.
17. Konkol A., Booker G.R., Wilshaw P.R. Ultramicroscopy. 58:1995;223.
18. Konkol A. Scanning. 18:1996;13.
19. P.G. Merli, V. Morandi, Work in progress.
20. S.J. Pennycook, in: S. Amelincks, D. Van Dyck, J. Van Landuyt, G. Van Tendeloo (Eds.), Handbook of Microscopy, Vol. 2, VCH, New York, 1997, p. 595.
21. S.J. Pennycook, Adv. Imag. Elect. Phys., to be published.