Role of F on the electrical activation of As in Ge

ECS Journal of Solid State Science and Technology

Volumn 1, Issue 3, 2012, Pages

  Impellizzeri, G ^a   Napolitani, E ^b   Boninelli, S ^a   Sullivan, J P ^c   Roberts, J ^c   Buckman, S J ^c   Ruffell, S ^c   Priolo, F ^a   Privitera, V ^a  

^a UNIVERSITY OF CATANIA   (Italy)

^b UNIVERSITY OF PADOVA   (Italy)

^c AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84887327548     PISSN: 21628769     EISSN: 21628777     Source Type: Journal    
DOI: 10.1149/2.009203jss     Document Type: Article

References (25)

1. C. Claeys and E. Simoen, Germanium-Based Technologies - From Materials to Devices (Elsevier, Amsterdam, 2007).
2. C. Claeys, E. Simoen, K. Opsomer, D. P. Brunco, and M. Meuris, Mater. Sci. Eng. B, 154, 49 (2008).
3. S. Brotzmann and H. Bracht, J. Appl. Phys., 103, 033508 (2008).
4. A. Chroneos, R. W. Grimes, B. P. Uberuaga, S. Brotzmann, and H. Bracht, Appl. Phys. Lett., 91, 192106 (2007).
5. S. Brotzmann, H. Bracht, L. Lundsgaard Hansen, A. Nylandsted Larsen, E. Simoen, E. E. Haller, J. S. Christensen, and P. Werner, Phys. Rev. B, 77, 235207 (2008).
6. A. Chroneos, R. W. Grimes, B. P. Uberuaga, and H. Bracht, Phys. Rev. B, 77, 235208 (2008).
7. C. O. Chui, K. Gopalakrishnan, P. B. Griffin, J. D. Plummer, and K. C. Saraswat, Appl. Phys. Lett., 83, 3275 (2003).
8. V. I. Fistul, Impurities in Semiconductors: Solubility, Migration, and Interactions (CRC Press, Boca Raton, Florida, 2004), p. 157.
9. G. Impellizzeri, J. H. R. dos Santos, S. Mirabella, F. Priolo, E. Napolitani, and A. Carnera, Appl. Phys. Lett., 84, 1862 (2004).
10. S. Mirabella, G. Impellizzeri, E. Bruno, L. Romano, M. G. Grimaldi, F. Priolo, E. Napolitani, and A. Carnera, Appl. Phys. Lett., 86, 121905 (2005).
11. G. Impellizzeri, S.Mirabella, F. Priolo, E. Napolitani, and A. Carnera, J. Appl. Phys., 99, 103510 (2006).
12. S. Boninelli, A. Claverie, G. Impellizzeri, S. Mirabella, F. Priolo, E. Napolitani, and F. Cristiano, Appl. Phys. Lett., 89, 171916 (2006).
13. S. Boninelli, G. Impellizzeri, S. Mirabella, F. Priolo, E. Napolitani, N. Cherkashin, and F. Cristiano, Appl. Phys. Lett., 93, 061906 (2008).
14. M. Mastromatteo, D. De Salvador, E. Napolitani, F. Panciera, G. Bisognin, A. Carnera, G. Impellizzeri, S. Mirabella, and F. Priolo, Phys. Rev. B, 82, 155323 (2010).
15. G. Impellizzeri, S. Mirabella, A. M. Piro, M. G. Grimaldi, F. Priolo, F. Giannazzo, V. Raineri, E. Napolitani, and A. Carnera, Appl. Phys. Lett., 91, 132101 (2007).
16. G. Impellizzeri, S. Boninelli, F. Priolo, E. Napolitani, C. Spinella, A. Chroneos, and H. Bracht, J. Appl. Phys., 109, 113527 (2011).
17. A. Chroneos, R. W. Grimes, and H. Bracht, J. Appl. Phys., 106, 063707 (2009).
18. S. Boninelli, G. Impellizzeri, F. Priolo, E. Napolitani, and C. Spinella, Nucl. Instrum. Methods B, 282, 21 (2012).
19. V. Privitera, W. Vandervorst, and T. Clarysse, J. Electrochem. Soc., 140, 262 (1993).
20. G. Impellizzeri, E. Napolitani, S. Boninelli, V. Privitera, T. Clarysse,W. Vandervorst, and F. Priolo, Applied Physics Express, 5, 021301 (2012).
21. S. M. Sze and J. C. Irvin, Solid State Electron., 11, 599 (1968).
22. J. P. Sullivan, J. Roberts, R. W.Weed,M. R.Went, D. S. Newman, and S. J. Buckman, Meas. Sci. Technol., 21, 085702 (2010).
23. T. Clarysse, W. Vandervorst, and A. Casel, Appl. Phys. Lett., 57, 2856 (1990).
24. R. Krause-Rehberg, H. S. Leipner, A. Kupsch, A. Polity, and Th. Drost, Phys. Rev. B, 49, 2385 (1994).
25. K. Kuitunen, F. Tuomisto, and J. Slotte, Phys. Rev. B, 78, 033202 (2008).