Fabrication and testing of polymer cantilevers for VOC sensors

Sensors and Actuators, A: Physical

Volumn 202, Issue , 2013, Pages 233-239

  Shiraishi, N ^a,d   Ikehara, T ^a,b   Dao, D V ^a,c   Sugiyama, S ^a   Ando, Y ^b,d  

^a Japan   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c GRIFFITH UNIVERSITY   (Australia)

^d TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

Author keywords

Cantilever; Polymer; Quality factor; VOC sensor

Indexed keywords

CANTILEVER; HOT-EMBOSSING; POLISHING TECHNIQUES; POLYMER CANTILEVERS; QUALITY FACTORS; RESONANCE FREQUENCIES; VIBRATION MODES; VOC SENSOR;

ATMOSPHERIC PRESSURE; NATURAL FREQUENCIES; POLYMERS; POLYMETHYL METHACRYLATES; SENSORS; VOLATILE ORGANIC COMPOUNDS;

NANOCANTILEVERS;

EID: 84887114675     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2013.01.011     Document Type: Article

References (23)

1. T. Mihara Design, fabrication and evaluation of highly sensitive compact chemical sensor system employing a microcantilever array and a preconcentrator Sensors and Materials 23 7 2011 397 417
2. M. Maute Detection of volatile organic compounds VOCs/with polymer-coated cantilevers Sensors and Actuators B 58 1999 505 511 (Pubitemid 30529520)
3. D. Spitzer Bio-inspired nanostructured sensor for the detection of ultralow concentrations of explosives Angewandte Chemie-International Edition 2012 51 2012 5334 5338
4. J. Lu High quality factor silicon cantilever driven by PZT actuator for resonant based mass detection DTIP of MEMS/MOEMS 2008 60 65
5. T. Ikehara A high quality-factor silicon cantilever for a low detection-limit resonant mass sensor operated in air Journal of Micromechanics and Microengineering 17 2007 2491 2494 (Pubitemid 350242892)
6. F.R. Blom Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry Journal of Vacuum Science & Technology B 10 1992 19 26
7. J. Lu, 2007, Mechanical quality factor of micro cantilevers for mass sensing applications, SPIE, microelectronics, MEMS, and nanotechnology 2007, Australia, December 2007.
8. C. Ziegler Cantilever-based biosensors Analytical and Bioanalytical Chemistry 379 2004 946 959 (Pubitemid 40877526)
9. R. Datar Cantilever Sensors: Nanomechanical Tools for Diagnostics vol. 34 2009 Mrs. Bulletin pp. 449-454
10. J.C. Webb The role of polymethylmethacrylate bone cement in modern orthopedic surgery Journal of Bone and Joint Surgery 89 2007 851 857 (Pubitemid 47322779)
11. A. Boger Variation of the mechanical properties of PMMA to suit osteoporotic cancellous bone Journal of Biomaterial Science Polymer Edition 19 2008 1125 1142
12. M. Suter, and 2011 Low-cost fabrication of PMMA and PMMA based magnetic composite cantilevers Proceedings of IEEE Transducers'11 Beijing, China, June 5-9 2011
13. M. Calleja Polymeric cantilever arrays for biosensing Applications, Sensor Letters vol1 2003 1 5
14. S. Mouaziz Polymer-based cantilevers with integrated electrodes Journal of microelectromechanical systems 15 4 2006 890 895 (Pubitemid 44251396)
15. A. Johansson SU-8 cantilever sensor system with integrated readout Sensors and Actuators A 123/124 2005 111 115 (Pubitemid 41315840)
16. S. Amaya Novel fabrication process for a monolithic PMMA torsion mirror and vertical comb actuator Journal of Micromechanics and Microengineering (JMM) 21 2011 7 No. 065032
17. J. Capodagli Isothermal viscoelastic properties of PMMA and LDPE over 11 decades of frequency and time: a test of time-temperature superposition Springer Rheol Acta 47 2008 777 786
18. T. Lee Resonant ultrasound spectroscopy for measurement of mechanical damping: Comparison with broadband viscoelastic spectroscopy Review of Scientific Instruments 71 7 2000 2855 2861
19. Nikkan Kogyo Shimbun Ltd. Plastic seikei kakou data book second ed. 2002 Nikkan Kogyo Shimbun Ltd.
20. J. Lu Energy dissipation mechanisms in lead zirconate titanate thin film transduced micro cantilevers Japanese Journal of Applied Physics 45 2006 8795 8800 (Pubitemid 47253151)
21. Z. Hao An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations Sensors and Actuators A 109 2003 156 164
22. K.Y. Yasumura Quality factors in micron- and submicron-thick cantilevers Journal of microelectromechanical systems 9 1 2000 117 125 MARCH (Pubitemid 30581703)
23. F. Lochon Effect of viscoelasticity on quality factor of microcantilever chemical sensors: optimal coating thickness for minimum limit of detection Proceedings of IEEE Sensors 2005 265 268 (Irvine)