Design, fabrication, and evaluation of highly sensitive compact chemical sensor system employing a microcantilever array and a preconcentrator

Sensors and Materials

Volumn 23, Issue 7, 2011, Pages 397-417

  Mihara, Takashi ^a   Ikehara, Tsuyoshi ^b   Konno, Mitsuo ^b   Murakami, Sunao ^b   Maeda, Ryutaro ^b   Fukawa, Tadashi ^c   Kimura, Mutsumi ^c  

^a OLYMPUS CORPORATION   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c SHINSHU UNIVERSITY   (Japan)

Author keywords

Acetone; Acrylonitrile co butadiene; Cantilever array; Chemical sensor; Microcantilever; Poly butadiene; Preconcentrator; Toluene; Xylene

Indexed keywords

ABSORPTION/DESORPTION; ACRYLONITRILE-CO-BUTADIENE; AIR PUMPS; ANALYTICAL FUNCTIONS; CANTILEVER ARRAYS; CHEMICAL SENSOR SYSTEMS; DETECTION LIMITS; ENVIRONMENTAL MONITORING; HIGHLY SENSITIVE; MASS SENSOR; MICRO-CANTILEVERS; MICROCANTILEVER ARRAYS; MICROCANTILEVER SENSOR ARRAYS; P-XYLENE; PRE-CONCENTRATION; PRE-CONCENTRATOR; PRECONCENTRATION TIME; PZT ACTUATOR; ROOM TEMPERATURE; SAMPLE VOLUME; SENSOR SYSTEMS; SEPARATE DETECTION; SILICON CHIP; SILICON MICROCANTILEVERS; SYSTEM EFFICIENCY; VIBRATION MODES;

ACETONE; BUTADIENE; CARBON FIBERS; COMPOSITE MICROMECHANICS; FABRICATION; MICROELECTROMECHANICAL DEVICES; NANOCANTILEVERS; NATURAL FREQUENCIES; PLASTIC COATINGS; POLYBUTADIENES; POLYMERS; SENSOR ARRAYS; THERMAL DESORPTION; TOLUENE; XYLENE;

CHEMICAL SENSORS;

EID: 81355124303     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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