High quality factor silicon cantilever driven by PZT actuator for resonant based mass detection

DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

Volumn , Issue , 2008, Pages 60-65

  Lu, J ^a   Ikehara, T ^a   Zhang, Y ^a   Mihara, T ^b   Itoh, T ^a   Maeda, R ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b OLYMPUS CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; ATOMIC FORCE MICROSCOPY; ENERGY DISSIPATION; MEMS; MICROELECTROMECHANICAL DEVICES; NANOCANTILEVERS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; SEMICONDUCTING LEAD COMPOUNDS; SILICON WAFERS; SINGLE CRYSTALS;

HIGH MODES; HIGH-QUALITY FACTORS; LEAD ZIRCONAT TITANATES; MASS DETECTIONS; OPTIMIZED STRUCTURES; PZT ACTUATORS; PZT FILMS; Q FACTORS; REDUCED PRESSURES; RESONANT STRUCTURES; SENSITIVE MASS; SILICON CANTILEVERS; SINGLE CRYSTAL SILICON CANTILEVERS; SUPPORT LOSS; VIBRATION AMPLITUDES;

Q FACTOR MEASUREMENT;

EID: 62249202868     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DTIP.2008.4752953     Document Type: Conference Paper

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