Novel fabrication process for a monolithic PMMA torsion mirror and vertical comb actuator

Journal of Micromechanics and Microengineering

Volumn 21, Issue 6, 2011, Pages

  Amaya, Satoshi ^a   Dao, Dzung Viet ^b   Sugiyama, Susumu ^b  

^a TOWA Corporation   (Japan)

^b RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIRECT BONDING; ELLIPTICAL VIBRATION CUTTING; FABRICATION PROCESS; HOT-EMBOSSING; METALLIZATIONS; MICROSTRUCTURE FORMATION; MIRROR DEVICES; REINFORCEMENT MATERIALS; RELEASE PROCESS; SILICON MOLDS; SURFACE ACTIVATION; TORSION-MIRRORS; VERTICAL COMB ACTUATORS; VERTICAL COMB-DRIVE ACTUATOR;

ACTUATORS; MICROSTRUCTURE; MIRRORS; TORSIONAL STRESS; ULTRASONIC DEVICES;

FABRICATION;

EID: 79957943894     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/6/065032     Document Type: Article

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