Effect of viscoelasticity on quality factor of microcantilever chemical sensors: Optimal coating thickness for minimum limit of detection

Proceedings of IEEE Sensors

Volumn 2005, Issue , 2005, Pages 265-268

  Lochon, F ^a   Dufour, I ^a   Rebiere D ^a   Sampath, U ^b   Heinrich, S M ^b   Josse, F ^b  

^a UNIVERSITÉ BORDEAUX 1   (France)

^b MARQUETTE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; POLYMERS; QUALITY CONTROL; VISCOELASTICITY;

FREQUENCY NOISE; MICROCANTILEVERS; POLYMER COATINGS;

CHEMICAL SENSORS;

EID: 33847295764     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2005.1597687     Document Type: Conference Paper

References (10)

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