Thermoelectric properties of epitaxial ScN films deposited by reactive magnetron sputtering onto MgO(001) substrates

Journal of Applied Physics

Volumn 113, Issue 15, 2013, Pages

  Burmistrova, Polina V ^a   Maassen, Jesse ^a   Favaloro, Tela ^b   Saha, Bivas ^a   Salamat, Shuaib ^a   Rui Koh, Yee ^a   Lundstrom, Mark S ^a   Shakouri, Ali ^a,b   Sands, Timothy D ^a  

^a PURDUE UNIVERSITY   (United States)

^b University of California Santa Cruz   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL RESULTS; DC REACTIVE MAGNETRON SPUTTERING; FIRST-PRINCIPLES DENSITY FUNCTIONAL THEORY; REACTIVE MAGNETRON SPUTTERING; SUBSTRATE TEMPERATURE; THEORETICAL MODELING; THERMOELECTRIC POWER FACTORS; THERMOELECTRIC PROPERTIES;

ELECTRIC POWER FACTOR; ELECTRONIC STRUCTURE; EPITAXIAL FILMS; EPITAXIAL GROWTH; MAGNESIA; MAGNETRON SPUTTERING; OXYGEN; SUBSTRATES; THERMAL CONDUCTIVITY; THERMOELECTRIC EQUIPMENT; THERMOELECTRIC POWER;

THERMOELECTRICITY;

EID: 84883263768     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4801886     Document Type: Article

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