HVPE of scandium nitride on 6H-SiC(0 0 0 1)

Journal of Crystal Growth

Volumn 310, Issue 6, 2008, Pages 1075-1080

  Edgar, J H ^a   Bohnen, T ^a   Hageman, P R ^a  

^a RADBOUD UNIVERSITY NIJMEGEN   (Netherlands)

Author keywords

A1. Impurities; A1. X ray diffraction; A3. Hydride vapor phase epitaxy; B1. Nitrides; B2 Semiconducting III V materials

Indexed keywords

DEPOSITION; HYDRIDES; IMPURITIES; SCANDIUM COMPOUNDS; THIN FILMS; VAPOR PHASE EPITAXY; X RAY DIFFRACTION;

HYDRIDE VAPOR PHASE EPITAXY; SCANDIUM SOURCE TEMPERATURE; SEMICONDUCTING III-V MATERIALS;

SILICON CARBIDE;

EID: 39649110119     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2007.12.053     Document Type: Article

References (19)

1. Rajan V., Bellaiche L., and Walter E.J. Phys. Rev. Lett. 90 (2003) 257602
2. Herwadkar A., and Lambrecht W.R.L. Phys. Rev. B 72 (2005) 235207
3. Moram M.A., Barber Z.H., Humphreys C.J., Joyce T.B., and Chalker P.R. J. Appl. Phys. 100 (2006) 023514/1
4. Moram M.A., Kappers M.J., Joyce T.B., Chalker P.R., Barber Z.H., and Humphreys C.J. J. Crystal Growth 308 (2007) 302
5. Ranjan V., Bin-Omran S., Sichuga D., Nichols R.S., and Bellaiche L. Phys. Rev. B 72 (2005) 085315
6. Perjeru F., Bai X., Ortiz-Libreros M.I., Higgins R., and Kordesch M.E. Appl. Surf. Sci. 175 (2001) 490
7. Constantin C., Al-Brithen H., Haider M.B., Ingram D., and Smith A.R. Phys. Rev. B 70 (2004) 193309
8. Constantin C., Haider M.B., Ingram D., Smith A.R., Sandler N., Sun K., and Ordejon P. J. Appl. Phys. 98 (2005) 23501/1
9. M.A. Moram, T.B. Joyce, P.R. Chalker, Z.H. Barber, C.J. Humphreys, GaN, AlN, InN and related materials, in: Material Research Society Symposium Proceeedings, vol. 892 2006, p. 723.
10. Gu Z., Edgar J.H., Pomeroy J., Kuball M., and Coffey D.W. J. Mater. Sci. Mater. Electron. 15 (2004) 555
11. Al-Brithen H.A., Smith A.R., and Gall D. Phys. Rev. B 70 (2004) 045303
12. Dismukes J.P., Yim W.M., and Ban V.S. J. Crystal Growth 13/14 (1972) 365
13. Rajan V., Bellaiche L., and Walter E.J. Phys. Rev. Lett. 90 (2003) 257602
14. Dismukes J.P., Yim W.M., Tietjen J.J., and Novak R.E. RCA Rev. 31 (1970) 680
15. Corbett J.D., and Ramsey B.N. Inorg. Chem. 4 (1965) 260
16. Hubbard K.J., and Schlom D.G. J. Mater. Res. 11 (1996) 2757
17. Polyachenok L.D., Nazarov K., and Polyachenok O.G. Z. Fiz. Khim. 52 (1978) 1767
18. Lengauer W. J. Solid State Chem. 76 (1988) 412
19. Patrikeev Y.B., Morozova V.A., Dudchik G.P., Polyachenok O.G., and Novikov G.I. Z. Fiz. Khim. 47 (1973) 266