The effect of oxygen incorporation in sputtered scandium nitride films

Thin Solid Films

Volumn 516, Issue 23, 2008, Pages 8569-8572

  Moram, M A ^a   Barber, Z H ^a   Humphreys, C J ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Band gap; Doping; Oxygen; Scandium nitride; Sputtering; X ray diffraction

Indexed keywords

CORUNDUM; NITRIDES; NONMETALS; OXYGEN; REACTIVE SPUTTERING; SCANDIUM; SPUTTER DEPOSITION; THICK FILMS;

BAND GAP; BASE PRESSURE; DEPOSITION CHAMBERS; DOPING; EFFECT OF OXYGEN; NITRIDE FILMS; REACTIVE MAGNETRON SPUTTERING; SAPPHIRE SUBSTRATES; SCANDIUM NITRIDE; SPUTTERING; THIN FILMS; X-RAY DIFFRACTION;

MAGNETRON SPUTTERING;

EID: 50849085749     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.05.050     Document Type: Article

References (31)

1. Gschneider Jr. K.A., Melson G.A., Melson D.A., Youngblood D.H., and Schock H.H. In: Horovitz C.T. (Ed). Scandium: Its Occurrence vol. 165 (1975), Academic Press, London
2. Dismukes J.P., Yim W.M., and Ban V.S. J. Cryst. Growth 13-14 (1972) 365
3. Bai X., and Kordesch M.E. Appl. Surf. Sci. 175 (2001) 499
4. Lambrecht W.R.L. Phys. Rev., B 62 (2000) 13538
5. Moram M.A., Joyce T.B., Chalker P.R., Barber Z.H., and Humphreys C.J. J. Appl. Phys. 100 (2006) 023514
6. Moustakas T.D., Molnar R.J., and Dismukes J.P. ECS Proc. 96-11 (1996) 110
7. Kaplan R., Prokes S.M., Binari S.C., and Kelner G. Appl. Phys. Lett. 68 (1996) 3248
8. Gu Z., Edgar J.H., Pomeroy J., Kuball M., and Coffey D.W. J. Mater. Sci., Mater. Electron. 15 (2004) 555
9. Gu Z., Edgar J.H., Coffey D.W., Chaudhuri J., Nyakiti L., Lee R.G., and Wen J.G. J. Cryst. Growth 293 (2006) 242
10. Moram M.A., Zhang Y., Kappers M.J., Barber Z.H., and Humphreys C.J. Appl. Phys. Lett. 92 (2007) 152101
11. Moram M.A., Kappers M.J., Barber Z.H., and Humphreys C.J. J. Cryst. Growth 298 (2007) 268
12. Gall D., Petrov I., Desjardins P., and Greene J.E. J. Appl. Phys. 86 (1999) 5524
13. Moustakas T.D., Molnar R.J., and Dismukes J.P. ECS Proc. 96-11 (1996) 197
14. Liu C.-P., and Yang H.-G. Thin Solid Films 444 (2003) 111
15. Meng W.J., Heremans J., and Cheng Y.T. Appl. Phys. Lett. 50 (1991) 2097
16. Groudeva-Zotova S., Kaltofen R., and Sebald T. Surf. Coat. Technol. 127 (2000) 144
17. Gall D., Petrov I., Madsen L.D., Sundgren J.-E., and Greene J.E. J. Vac. Sci. Technol., A 16 (1998) 2411
18. Ermoshkin A.N., and Kuznetsov A.I. Sov. Phys., Solid State 25 (1983) 981
19. Kaye G.W.C., and Laby T.H. Tables of Physical and Chemical Constants. 16th Edn (1995), Longman
20. Okada Y., and Tokumaru Y. J. Appl. Phys. 56 (1984) 314
21. Berg S., Eguchi N., Grajewski V., Kim S.W., and Fromm E. Surf. Coat. Technol. 49 (1991) 336
22. Al-Brithen H.A.H., Trifan E.M., Ingram D.C., Smith A.R., and Gall D. J. Cryst. Growth 242 (2002) 345
23. Gall D., Petrov I., and Greene J.E. J. Appl. Phys. 89 (2001) 401
24. Gall D., Stadele M., Jarrendahl K., Petrov I., Desjardins P., Haasch R.T., Lee T.-Y., and Greene J.E. Phys. Rev. B 63 (2001) 125119
25. Kaldis E., and Zurcher C. Helv. Phys. Acta 47 (1974) 421
26. Smith A.R., Al-Brithen H.A.H., Ingram D.C., and Gall D. J. Appl. Phys. 90 (2001) 1809
27. Moram M.A., Joyce T.B., Chalker P.R., Barber Z.H., and Humphreys C.J. Appl. Surf. Sci. 252 (2006) 8385
28. Gall D., Petrov I., Hellgren N., Hultman L., Sundgren J.E., and Greene J.E. J. Appl. Phys. 84 (1998) 6034
29. Sclar N. J. Appl. Phys. 33 (1962) 2999
30. Sclar N. J. Appl. Phys. 35 (1964) 1534
31. Travaglini G., Marabelli F., Monnier R., Kaldis E., and Wachter P. Phys. Rev., B. 34 (1986) 3876