Nanofabrication processes for innovative nanohole-based solar cells

Physica Status Solidi (A) Applications and Materials Science

Volumn 210, Issue 8, 2013, Pages 1564-1570

  Garozzo, Cristina ^a   Bongiorno, Corrado ^a   Franco, Salvatore Di ^a   Italia, Markus ^a   Magna, Antonino La ^a   Scalese, Silvia ^a   Sberna, Paolo Maria ^b   Puglisi, Rosaria A ^a  

^a CNR   (Italy)

^b UNIVERSITY OF CATANIA   (Italy)

Author keywords

Bosch process; chemical doping; copolymers; dry etch; nanolithography

Indexed keywords

BOSCH PROCESS; CHEMICAL DOPING; FABRICATION COST; N- AND P-TYPE DOPING; NANOFABRICATION PROCESS; ONE DIMENSIONAL (1D) STRUCTURES; ORDERED NANOSTRUCTURES; VISIBLE LIGHT ABSORPTION;

COPOLYMERS; DRY ETCHING; LITHOGRAPHY; NANOLITHOGRAPHY; NANOWIRES; QUANTUM ELECTRONICS;

SOLAR CELLS;

EID: 84882449169     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.201200949     Document Type: Article

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