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Volumn 52, Issue 12, 2005, Pages 2308-2313

The effects of ZnO films on surface acoustic wave properties of modified lead titanate ceramic substrates

Author keywords

Atomic force microscopy; Crystalline structures; Polycrystal zinc oxide films; rf magnetron sputtering technique; Scanning electron microscopy; SEM; Strontium modified lead titanate ceramic substrates; Surface acoustic wave properties; X ray diffraction; XRD

Indexed keywords

PHASE VELOCITY; POLYCRYSTAL ZINC OXIDE FILMS; TEMPERATURE COEFFICIENTS;

EID: 32844469621     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2005.1563275     Document Type: Article
Times cited : (11)

References (34)
  • 1
    • 0001459197 scopus 로고
    • Thin-film ZnO-properties and applications
    • C. M. Frans and V. D. Pol, "Thin-film ZnO-properties and applications," Ceram. Bull., vol. 69, pp. 1959-1965, 1990.
    • (1990) Ceram. Bull. , vol.69 , pp. 1959-1965
    • Frans, C.M.1    Pol, V.D.2
  • 2
    • 0001325003 scopus 로고    scopus 로고
    • Optical phonon confinement in zinc oxide nanoparticles
    • M. Rajalakshmi and A. K. Arora, "Optical phonon confinement in zinc oxide nanoparticles," J. Appl. Phys., vol. 87, pp. 2445-2448, 2000.
    • (2000) J. Appl. Phys. , vol.87 , pp. 2445-2448
    • Rajalakshmi, M.1    Arora, A.K.2
  • 3
    • 0031222979 scopus 로고    scopus 로고
    • Ferroelectric properties in piezoelectric semiconductor Zn1-XmxO (M = Li, Mg)
    • A. Onodera, N. Tamaki, K. Jin, and H. Yamashita, "Ferroelectric properties in piezoelectric semiconductor Zn1-XmxO (M = Li, Mg)," Jpn. J. Appl. Phys., vol. 36, pp. 6008-6011, 1997.
    • (1997) Jpn. J. Appl. Phys. , vol.36 , pp. 6008-6011
    • Onodera, A.1    Tamaki, N.2    Jin, K.3    Yamashita, H.4
  • 5
    • 0022114946 scopus 로고
    • Zinc oxide films for acoustoelectric device applications
    • F. S. Hickernell, "Zinc oxide films for acoustoelectric device applications," IEEE Trans. Sonics Ultrason., vol. 32, pp. 621-629, 1985.
    • (1985) IEEE Trans. Sonics Ultrason. , vol.32 , pp. 621-629
    • Hickernell, F.S.1
  • 6
    • 0030289248 scopus 로고    scopus 로고
    • Sol-gel synthesis of ZnO thin films
    • M. N. Kamalasanan and S. Chandra, "Sol-gel synthesis of ZnO thin films," Thin Solid Films, vol. 288, pp. 112-115, 1996.
    • (1996) Thin Solid Films , vol.288 , pp. 112-115
    • Kamalasanan, M.N.1    Chandra, S.2
  • 7
    • 0032663894 scopus 로고    scopus 로고
    • Growth, structure and optical characterization of high quality ZnO thin films obtained by spray pyrolysis
    • F. D. Paraguay, W. L. Estrada, D. R. N. Acosta, E. Andrade, and M. M. Yoshida, "Growth, structure and optical characterization of high quality ZnO thin films obtained by spray pyrolysis," Thin Solid Films, vol. 350, pp. 192-202, 1999.
    • (1999) Thin Solid Films , vol.350 , pp. 192-202
    • Paraguay, F.D.1    Estrada, W.L.2    Acosta, D.R.N.3    Andrade, E.4    Yoshida, M.M.5
  • 8
    • 0033706479 scopus 로고    scopus 로고
    • 3 by electron cyclotron resonance-assisted molecular beam epitaxy and determination of its polarity
    • 3 by electron cyclotron resonance-assisted molecular beam epitaxy and determination of its polarity," Jpn. J. Appl. Phys., vol. 39, pp. 534-536, 2000.
    • (2000) Jpn. J. Appl. Phys. , vol.39 , pp. 534-536
    • Nakamura, K.1    Shoji, T.2    Kang, H.B.3
  • 9
    • 0028441635 scopus 로고
    • Transparent and conductive ZnO thin films prepared by atmospheric-pressure chemical vapor deposition using zinc acetylacetonate
    • T. Minami, H. Sonohara, S. Takata, and H. Sato, "Transparent and conductive ZnO thin films prepared by atmospheric-pressure chemical vapor deposition using zinc acetylacetonate," Jpn. J. Appl. Phys., vol. 33, pp. 743-746, 1994.
    • (1994) Jpn. J. Appl. Phys. , vol.33 , pp. 743-746
    • Minami, T.1    Sonohara, H.2    Takata, S.3    Sato, H.4
  • 10
    • 0017971014 scopus 로고
    • Controlled texture of reactively RFsputtered ZnO thin films
    • S. Maniv and A. Zangvil, "Controlled texture of reactively RFsputtered ZnO thin films," J. Appl. Phys., vol. 49, pp. 2787-2792, 1978.
    • (1978) J. Appl. Phys. , vol.49 , pp. 2787-2792
    • Maniv, S.1    Zangvil, A.2
  • 11
    • 0032049621 scopus 로고    scopus 로고
    • Growth of ZnO thin films on interdigital transducer/Corning 7059 glass substrate by two-step fabrication methods for surface acoustic wave applications
    • M. S. Wu, W. C. Shih, and W. H. Tsai, "Growth of ZnO thin films on interdigital transducer/Corning 7059 glass substrate by two-step fabrication methods for surface acoustic wave applications," J. Phys. D: Appl. Phys., vol. 31, pp. 943-950, 1998.
    • (1998) J. Phys. D: Appl. Phys. , vol.31 , pp. 943-950
    • Wu, M.S.1    Shih, W.C.2    Tsai, W.H.3
  • 13
    • 0031074701 scopus 로고    scopus 로고
    • Characterization and optimization of zinc oxide films by RF magnetron sputtering
    • K. B. Sundaram and A. Khan, "Characterization and optimization of zinc oxide films by RF magnetron sputtering," Thin Solid Films, vol. 295, pp. 87-91, 1997.
    • (1997) Thin Solid Films , vol.295 , pp. 87-91
    • Sundaram, K.B.1    Khan, A.2
  • 14
    • 0023646612 scopus 로고
    • Some physical properties of ZnO sputtered films
    • N. Croitoru, A. Seidman, and K. Yassin, "Some physical properties of ZnO sputtered films," Thin Solid Films, vol. 150, pp. 291-301, 1987.
    • (1987) Thin Solid Films , vol.150 , pp. 291-301
    • Croitoru, N.1    Seidman, A.2    Yassin, K.3
  • 15
    • 0036642617 scopus 로고    scopus 로고
    • Physical and structural properties of ZnO sputtered films
    • W. Water and S. Y. Chu, "Physical and structural properties of ZnO sputtered films," Mater. Lett., vol. 55, pp. 67-72, 2002.
    • (2002) Mater. Lett. , vol.55 , pp. 67-72
    • Water, W.1    Chu, S.Y.2
  • 16
    • 0041980887 scopus 로고    scopus 로고
    • A study of love wave acoustic sensors in ZnO/quartz structure
    • S. Y. Chu, W. Water, and J. T. Liaw, "A study of love wave acoustic sensors in ZnO/quartz structure," Integr. Ferroelect., vol. 44, pp. 91-100, 2002.
    • (2002) Integr. Ferroelect. , vol.44 , pp. 91-100
    • Chu, S.Y.1    Water, W.2    Liaw, J.T.3
  • 17
    • 0041360354 scopus 로고    scopus 로고
    • 3-based ceramics and its application for SAW devices
    • 3-based ceramics and its application for SAW devices," J. Cryst. Growth, vol. 257, pp. 280-285, 2003.
    • (2003) J. Cryst. Growth , vol.257 , pp. 280-285
    • Chu, S.Y.1    Chen, T.Y.2    Water, W.3
  • 18
    • 0025417520 scopus 로고
    • Lead titanate ceramics with large piezoelectric anisotropy and their application
    • T. Takahashi, "Lead titanate ceramics with large piezoelectric anisotropy and their application," Ceram. Bull., vol. 69, pp. 691-695, 1990.
    • (1990) Ceram. Bull. , vol.69 , pp. 691-695
    • Takahashi, T.1
  • 20
    • 0000327240 scopus 로고
    • Elastic surface waves on free surface and metallized surface of CdS, ZnO, and PZT-4
    • C. C. Tseng, "Elastic surface waves on free surface and metallized surface of CdS, ZnO, and PZT-4," J. Appl. Phys., vol. 38, pp. 4281-4283, 1967.
    • (1967) J. Appl. Phys. , vol.38 , pp. 4281-4283
    • Tseng, C.C.1
  • 21
    • 0016576848 scopus 로고
    • Fabrication of temperature stabilised piezoelectric ceramic for surface acoustic wave application
    • M. Kodama, H. Egami, and S. Yoshida, "Fabrication of temperature stabilised piezoelectric ceramic for surface acoustic wave application," Jpn. J. Appl. Phys., vol. 14, pp. 1847-1848, 1975.
    • (1975) Jpn. J. Appl. Phys. , vol.14 , pp. 1847-1848
    • Kodama, M.1    Egami, H.2    Yoshida, S.3
  • 24
    • 36449003958 scopus 로고
    • Experimental determination of the surface acoustic wave properties of new fine grain piezoelectric ceramics
    • G. Feuillard, M. Lethiecq, Y. Amazit, D. Certon, C. Millar, and F. Patat, "Experimental determination of the surface acoustic wave properties of new fine grain piezoelectric ceramics," J. Appl. Phys., vol. 71, pp. 6523-6529, 1993.
    • (1993) J. Appl. Phys. , vol.71 , pp. 6523-6529
    • Feuillard, G.1    Lethiecq, M.2    Amazit, Y.3    Certon, D.4    Millar, C.5    Patat, F.6
  • 29
    • 84935357059 scopus 로고
    • IRE standards on piezoelectric crystals: Measurements of piezoelectric ceramics
    • H. Jaffe, "IRE standards on piezoelectric crystals: Measurements of piezoelectric ceramics," Proc. IRE, vol. 49, pp. 1161-1169, 1961.
    • (1961) Proc. IRE , vol.49 , pp. 1161-1169
    • Jaffe, H.1
  • 30
    • 0041529696 scopus 로고    scopus 로고
    • Raman and photoluminescence of ZnO films deposited on Si (111) using low-pressure metalorganic chemical vapor deposition
    • J. Ye, S. Gu, S. Zhu, T. Chen, W. Liu, F. Qin, L. Hu, R. Zhang, Y. Shi, and Y. Zheng, "Raman and photoluminescence of ZnO films deposited on Si (111) using low-pressure metalorganic chemical vapor deposition," J. Vac. Sci. Technol. A, vol. 21, pp. 979-982, 2003.
    • (2003) J. Vac. Sci. Technol. A , vol.21 , pp. 979-982
    • Ye, J.1    Gu, S.2    Zhu, S.3    Chen, T.4    Liu, W.5    Qin, F.6    Hu, L.7    Zhang, R.8    Shi, Y.9    Zheng, Y.10
  • 31
    • 0001590465 scopus 로고    scopus 로고
    • Influence of postdeposition annealing on the structural and optical properties of sputtered zinc oxide film
    • V. Gupta and A. Mansingh, "Influence of postdeposition annealing on the structural and optical properties of sputtered zinc oxide film," J. Appl. Phys., vol. 80, pp. 1063-1073, 1996.
    • (1996) J. Appl. Phys. , vol.80 , pp. 1063-1073
    • Gupta, V.1    Mansingh, A.2
  • 33
    • 0030364265 scopus 로고    scopus 로고
    • Measurement techniques for evaluating piezoelectric thin films
    • F. S. Hickernell, "Measurement techniques for evaluating piezoelectric thin films," in Proc. IEEE Ultrason. Symp., 1996, pp. 235-242.
    • (1996) Proc. IEEE Ultrason. Symp. , pp. 235-242
    • Hickernell, F.S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.