Deposition of high-quality zinc oxide thin films on diamond substrates for high-frequency surface acoustic wave filter applications

Thin Solid Films

Volumn 485, Issue 1-2, 2005, Pages 257-261

  Chen, J J ^a   Zeng, F ^a   Li, D M ^a   Niu, J B ^b   Pan, F ^a  

^a TSINGHUA UNIVERSITY   (China)

^b INSTITUTE OF MICROELECTRONICS   (China)

Author keywords

Diamond; Etching; Sputtering; Structure properties; Zinc oxide

Indexed keywords

ACOUSTIC SURFACE WAVE FILTERS; ATOMIC FORCE MICROSCOPY; BANDWIDTH; DEPOSITION; DIAMONDS; ETCHING; HIGH ENERGY ELECTRON DIFFRACTION; PIEZOELECTRIC MATERIALS; SCANNING ELECTRON MICROSCOPY; SPUTTERING; SUBSTRATES; TRANSDUCERS; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

ACOUSTIC PORPOGATION; ELASTIC CONSTANT; STRUCTURE PROPERTIES; SURFACE ACOUSTIC WAVES (SAW);

THIN FILMS;

EID: 21244437873     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.04.028     Document Type: Article

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