Integration of thin film bulk acoustic resonators onto flexible liquid crystal polymer substrates

Microelectronic Engineering

Volumn 88, Issue 6, 2011, Pages 1006-1009

  Wright, R V ^a   Hakemi, G ^a   Kirby, P B ^a  

^a CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

FBAR; Flexible electronics; LCP; RF MEMS

Indexed keywords

CHEMO-MECHANICAL POLISHING; CRYSTAL POLYMER SUBSTRATES; DEEP REACTIVE ION ETCH; ELECTROMECHANICAL COEFFICIENTS; FBAR; HIGH QUALITY; LCP; PARALLEL RESONANCE; Q-VALUES; RF-MEMS; SENSING APPLICATIONS; THIN FILM BULK ACOUSTIC RESONATOR; ZNO FILMS;

ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE FILTERS; LIQUID CRYSTALS; METAL CLADDING; RESONATORS; SUBSTRATES; THIN FILMS; ZINC OXIDE;

FLEXIBLE ELECTRONICS;

EID: 79952440545     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2011.01.038     Document Type: Article

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