AlN/ZnO/diamond waveguiding layer acoustic wave structure: Theoretical and experimental results

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 57, Issue 8, 2010, Pages 1818-1824

  Le Brizoual, Laurent ^a   Elmazria, Omar ^b   Zhgoon, Sergei ^c   Soussou, Akram ^a   Sarry, Frederic ^b   Djouadi, Mohammed Abdou ^a  

^a UNIVERSITÉ DE NANTES   (France)

^b INSTITUT JEAN LAMOUR   (France)

^c MOSCOW POWER ENGINEERING INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; ALUMINUM NITRIDE; ELECTROMECHANICAL COUPLING; FINITE ELEMENT METHOD; II-VI SEMICONDUCTORS; III-V SEMICONDUCTORS; WAVEGUIDES; ZINC OXIDE;

EXPERIMENTAL DEVICES; SURFACE DISPLACEMENT; THEORETICAL CALCULATIONS; WAVEGUIDING LAYER ACOUSTIC WAVE; ZNO LAYERS;

ACOUSTICS;

EID: 77955359915     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2010.1620     Document Type: Article

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