Production scheduling in a semiconductor wafer fabrication facility producing multiple product types with distinct due dates

IEEE Transactions on Robotics and Automation

Volumn 17, Issue 5, 2001, Pages 589-598

  Kim, Yeong Dae ^a,b   Kim, Jae Gon ^c   Choi, Bum ^b   Kim, Hyung Un ^d  

^a Korea Advanced Institute of Science and Technology ^*

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^c LG CNS Co Ltd   (South Korea)

^d Hynix Semiconductor Inc   (South Korea)

Author keywords

Batch scheduling; Lot release control; Lot scheduling; Semiconductor wafer fabrication; Simulation; Tardiness

Indexed keywords

APPLICATION SPECIFIC INTEGRATED CIRCUITS; COMPUTER SIMULATION; DECISION MAKING; MACHINERY; PROCESS CONTROL; PRODUCTION CONTROL; SCHEDULING; STATISTICAL METHODS;

BATCH SCHEDULING; LOT RELEASE CONTROL; LOT SCHEDULING; PRODUCTION SCHEDULING; SEMICONDUCTOR WAFER FABRICATION FACILITY; TARDINESS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0035485317     PISSN: 1042296X     EISSN: None     Source Type: Journal    
DOI: 10.1109/70.964660     Document Type: Article

References (23)

1. Control of batch processing systems in semiconductor wafer fabrication facilities
2. Scheduling semiconductor wafer fabrication
3. Scheduling batch processing machines with incompatible job families
4. Closed-loop job release control for VLSI circuit manufacturing
5. A simulation study on lot release control, mask scheduling and batch scheduling in semiconductor wafer fabrication facilities
6. Due-date based scheduling and control policies in a multiproduct semiconductor wafer fabrication facility
7. Scheduling of re-entrant flow shops
8. A robust production control policy for VLSI wafer fabrication
9. Practical issues in scheduling and dispatching in semiconductor wafer fabrication
10. Efficient scheduling policies to reduce mean and variance of cycle-time in semiconductor manufacturing plants
11. A general class of bulk service queue with poisson input
12. Dynamic batching heuristic for simultaneous processing
13. Control of multiproduct bulk service diffusion/oxidation processes
14. The use of upstream and downstream information in semiconductor batch operations
15. Control of multiproduct bulk server diffusion/oxidation processes. Part 2: Multiple servers
16. Minimizing total tardiness on a batch processing machine with incompatible job families
17. Job shop scheduling with modified due dates
18. A comparison of dispatching rules for job shops with multiple identical jobs and alternative routeings
19. A scheduling rule for job release in semiconductor fabrication
20. CONWIP: A pull alternative to kanban
21. A survey of scheduling rules
22. A state-of-the-art survey of dispatching rules for manufacturing jobshop operations