A novel timetabling algorithm for a furnace process for semiconductor fabrication with constrained waiting and frequency-based setups

OR Spectrum

Volumn 29, Issue 3, 2007, Pages 391-419

  Chien, Chen Fu ^a   Chen, Chien Hung ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Frequency based setup; Genetic algorithm; Scheduling; Semiconductor manufacturing; Waiting time constraint

Indexed keywords

EID: 34249729418     PISSN: 01716468     EISSN: 14366304     Source Type: Journal    
DOI: 10.1007/s00291-006-0062-3     Document Type: Article

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