Precursor adsorption efficiency of titanium tetra isopropoxide in the presence of a barium β-diketonate precursor

Surface and Coatings Technology

Volumn 230, Issue , 2013, Pages 297-304

  Reinke, Michael ^a,b   Kuzminykh, Yury ^a,b   Malandrino, Graziella ^c   Hoffmann, Patrik ^a,b  

^a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

^b EPFL   (Switzerland)

^c UNIVERSITY OF CATANIA   (Italy)

Author keywords

Barium titanate; High vacuum chemical vapor deposition; High vacuum chemical vapour deposition; Precursor efficiency; Precursor interaction; Sticking coefficient

Indexed keywords

CHEMICAL COMPOSITIONS; CHEMICAL VAPOUR DEPOSITION; ELECTRO OPTIC COEFFICIENT; HIGH VACUUM; INTEGRATED PHOTONICS; PRECURSOR INTERACTION; STICKING COEFFICIENTS; TITANIUM TETRAISOPROPOXIDE;

BARIUM TITANATE; CHEMICAL VAPOR DEPOSITION; DEPOSITS; FILM GROWTH; INTEGRATED OPTICS; OZONE; SUBSTRATES; TITANIUM; TITANIUM DIOXIDE; VAPORS;

BARIUM;

EID: 84881313618     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2013.06.016     Document Type: Article

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