Ferroelectric epitaxial thin films for integrated optics

Annual Review of Materials Research

Volumn 37, Issue , 2007, Pages 659-679

  Wessels, Bruce W ^a  

^a Northwestern University

Author keywords

Barium titanate; Electro optic; Modulator; Optical switching; Photonic crystal; Waveguide

Indexed keywords

BANDWIDTH; DEPOSITION; ELECTROOPTICAL EFFECTS; FERROELECTRIC FILMS; INTEGRATED OPTICS; OPTICAL LOSSES;

ELECTRO-OPTIC COEFFICIENTS; ELECTRO-OPTIC MODULATORS; EPITAXIAL DEPOSITION; LOW-INDEX SUBSTRATES;

EPITAXIAL FILMS;

EID: 34848829487     PISSN: 15317331     EISSN: None     Source Type: Book Series    
DOI: 10.1146/annurev.matsci.37.052506.084226     Document Type: Review

References (49)

1. Wooten EL, Kissa KM, Yi-Yan A, Murphy EJ, Lafaw DA, et al. 2000. A review of lithium niobate modulators for fiber optic communication systems. IEEE J. Sel. Top. Quant. Electron. 6:69-82
2. 3 modulators operating in the millimeter wavelength region. Proc. Optic Fiber Commun. 205-6
3. 3 traveling wave optical intensity modulators. J. Lightwave Technol. 12:1807-19
4. Holman RL, Johnson LM, Skinner DP. 1987. Desirability of electro-optic material for guided-wave optics. Opt. Eng. 26:134-42
5. 3. Appl. Phys. Lett. 71:1783-85
6. Wessels BW. 1998. Ferroelectric oxide epitaxial thin films: synthesis and nonlinear optical properties. J. Cryst. Growth 195:706-10
7. McKee RA, Walker FJ, Connor JR, Specht ED, Zelmon DE. 1991. Molecular beam epitaxy growth of epitaxial barium silicide, barium oxide, and barium titanate on silicon. Appl. Phys. Lett. 59:782-84
8. Nashimoto K, Pachter R, Wessels BW, Shmulovich J, Yen AK-Y, et al., eds. 2000. Thin Films for Optical Waveguide Devices and Materials for Optical Limiting. Warrendale: Mater. Res. Soc.
9. Atsuki K, Yamashita E. 1987. Transmission line aspects of the design of broad band electro-optic traveling-wave modulators. J. Lightwave Technol. LT-5:316-19
10. 3 crystals. Phys. Rev. B 50:5941-49
11. 3 on MgO. Appl. Phys. Lett. 69:2968-70
12. Gill DM, Ford GM, Block BA, Ho ST. 1998. Rare-earth doped guided wave fluorescence in thin film Er-doped barium titanate. MRS Proc. 486
13. Klein MB. 1983. Ferroelectric materials for electro-optic devices at millimeter wavelengths. Ferroelectrics 50:301-6
14. Wessels BW. 2004. Thin film ferroelectrics for guided wave devices. J. Electroceram. 13:135-38
15. 4 strip-loaded waveguide with low propagation loss. Electron Lett. 39:1651-52
16. Tang P, Towner DJ, Meier AL, Wessels BW. 2004. Low-voltage, polarization insensitive, electro-optic modulator on a polydomain barium titanate thin film. Appl. Phys. Lett. 85:4615-17
17. Kang HS, Kang HS, Lee WJ. 2002. Effects of deposition temperature and seed layer on the optical properties of lead zirconate titanate films. J. Vacuum Sci. Technol. A Vacuum Surf. Films 20:1498-504
18. Reitze DH, Haton E, Ramesh R, Etemad S, Leaird DE, et al. 1993. Electro-optic properties of single-crystalline ferroelectric thin films. Appl. Phys. Lett. 63:596-98
19. 3 thin-film waveguide modulators. Appl. Phys. Lett. 81:1375-77
20. Huang CH. 1995. Hybrid integrated optical-devices utilizing thin-films of lithium niobate. Integr. Ferroelect. 6:355-62
21. 3. Jpn. J. Appl. Phys. 38:5641-45
22. Jin GH, Zou YK, Fuflyigin V. 2000. PLZT film waveguide Mach-Zehnder electrooptic modulator. J. Lightwave Technol. 18:807-12
23. Nystrom MJ, Wessels BW, Chen J, Studebaker D, Marks TJ. 1995. Deposition of potassium niobate thin films by metalorganic chemical vapor deposition and their electro-optic properties. See Ref. 43, pp. 183-88
24. 3 waveguide modulators with 360 pm/V effective electro-optic coefficient at 1.55 microns. Proc. Integr. Photonics Conf. OSA: Late paper
25. Adachi H. 1991. Sputtering preparation of ferroelectric PLZT thin films and their optical applications. IEEE Trans. Ultrason. Ferroelectr. Freq. Cont. 38:645-55
26. Fork DK, Armani-Leplingard, Kingston JJ, Anderson GB. 1995. Thin film epitaxial oxide waveguides. See Ref. 43, pp. 189-200
27. Deleted in proof
28. 3 thin films. J. Cryst. Growth 255:107-13
29. 3 thin films. Phys. Rev. B 69:17401
30. Towner DJ, Lansford TJ, Wessels BW. 2004. Three dimensional domain structure in epitaxial barium titanate thin films. J. Electroceram. 13:89-93
31. Wessels BW. 1995. Metalorganic chemical vapor deposition of ferroelectric oxide thin films for electronic and optical applications. Annu. Rev. Mater. Sci. 25:525-46
32. 3 films using a liquid barium precursor. Adv. Mater. Chem. Vapor Depos. 6:175-77
33. 3. J. Mater. Res. In press
34. 3 films in a rotating disk vertical MOCVD reactor. J. Vac. Sci. Technol. B23:1674-78
35. 4 strip-loaded waveguide with low propagation loss. Electron. Lett. 39:1651-52
36. 3 thin film electro-optic modulators. Electron. Lett. 41:1296-97
37. Wessels BW. 2004. Thin film ferroelectrics for guided wave devices. J. Electroceram. 13:135-38
38. Tang P, Towner DJ, Hamano T, Meier AL, Wessels BW. 2004. Electro-optic modulation up to 40 GHz in a barium titanate thin film waveguide modulator. Opt. Express 12:5962-67
39. 3 thin films in the GHz frequency range. Appl. Phys. Lett. 83:5274-76
40. Taylor HF. 1999. Enhanced electro-optic modulation efficiency utilizing slow-wave optical propagation. J. Lightwave Technol. 17:1875-83
41. 3. Electron. Lett. 41:1028-30
42. 3. Electron. Lett. 41:1220-22
43. Wessels BW, Marder SR, Walba DM, eds. 1995. Thin Films for Integrated Optical Applications. Pittsburgh: Mater. Res. Soc.
44. 3. Photonics Technol. Lett. 16:1837-39
45. 3 materials. Appl. Phys. Lett. 76:769-73
46. 6). Appl. Phys. Lett. 68:3227-29
47. Tayebati P, Trivedi D, Tabat M. 1996. Pulsed laser deposition of SBN:75 thin films with electro-optic coefficient of 844 pm/V. Appl. Phys. Lett. 69:1023-25
48. 3 electro-optic modulator and its dynamic response. Proc. Integr. Photonics Res. Conf: Late paper. Washington, D.C.: OSA
49. Dalton LR. 2004. Integrated optics/electronics using electro-optic polymers. Presented at MRS Spring Meet., Abstract L7.2. San Francisco, CA