Recent progress in understanding the imaging and metrology using the helium ion microscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7378, Issue , 2009, Pages

  Postek, Michael T ^a   Vladar, Andras E ^a   Ming, Bin ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Helium ion; HIM; Microscopy; Nanomanufacturing; Nanometrology; Scanning electron microscope; SEM

Indexed keywords

HELIUM ION; HIM; MICROSCOPY; NANOMANUFACTURING; NANOMETROLOGY; SCANNING ELECTRON MICROSCOPE; SEM;

ELECTRON MICROSCOPES; HELIUM; ION MICROSCOPES; MEASUREMENTS; NANOTECHNOLOGY; RADIOACTIVITY; SCANNING; SCANNING ELECTRON MICROSCOPY;

IONS;

EID: 69949119148     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.824533     Document Type: Conference Paper

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