Simulation study on image contrast and spatial resolution in helium ion microscope

Journal of Electron Microscopy

Volumn 56, Issue 5, 2007, Pages 163-169

  Inai, Kensuke ^a   Ohya, Kaoru ^a   Ishitani, Tohru ^b  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

^b HITACHI HIGH TECHNOLOGIES CORPORATION   (Japan)

Author keywords

Atomic number contrast; Material contrast; Scanning electron microscope; Scanning ion microscope; Spatial resolution; Topographic contrast

Indexed keywords

GALLIUM; HELIUM; ION;

ARTICLE; CHEMISTRY; COMPUTER SIMULATION; INSTRUMENTATION; METHODOLOGY; MICROSCOPY; MONTE CARLO METHOD; SCANNING ELECTRON MICROSCOPY;

COMPUTER SIMULATION; GALLIUM; HELIUM; IONS; MICROSCOPY; MICROSCOPY, ELECTRON, SCANNING; MONTE CARLO METHOD;

ATOMS; ELECTRONS; HELIUM; IMAGE RESOLUTION; INTELLIGENT SYSTEMS; MONTE CARLO METHODS; SCANNING ELECTRON MICROSCOPY; SECONDARY EMISSION;

ATOMIC NUMBER CONTRAST; HELIUM ION; IONS BOMBARDMENT; MATERIAL CONTRAST; SCANNING ELECTRON MICROSCOPE; SCANNING ELECTRONS; SCANNING ION MICROSCOPES; SECONDARY ELECTRON YIELD; SPATIAL RESOLUTION; TOPOGRAPHIC CONTRAST;

ION BOMBARDMENT;

EID: 37549033045     PISSN: 00220744     EISSN: 14779986     Source Type: Journal    
DOI: 10.1093/jmicro/dfm024     Document Type: Article

References (32)

1. Tondare V N (2005) Quest for high brightness, monochromatic noble gas ion sources. J. Vac. Sci. Technol. A23: 1498-1508.
2. Liu X, and Orloff J (2005) Analytical model of a gas phase field ionization source. J. Vac. Sci. Technol. A23: 2816-2820.
3. Morgan J, Notte J, Hill R, and Ward B (2006) An introduction to the helium ion microscope. Microscopy Today, July, 24-31.
4. Ward B M, Notte J, and Economou N P (2006) Helium ion microscope: A new tool for nanoscale microscopy and metrology. J. Vac. Sci. Technol. B24: 2871-2874.
5. Joy C David, Friffin J Bendan, Notte John, Stern Lewis, McVey Shawn, Ward Bill, and Fenner Clarke (2007) Device metrology with high-performance scanning ion beams. Proc. SPIE 6518: 65181l-1.
6. Ohya K (2002) Monte Carlo simulation of heavy ion induced kinetic electron emission from an Al surface. Nucl. Instr. Meth. B195: 281-290.
7. Ohya K (2003) Comparative study of target atomic number dependence of ion induced and electron induced secondary electron emission. Nucl. Instr. Meth. Phys. Res. B206: 52-56.
8. Ishitani T, Madokoro Y, Nakagawa M, and Ohya K (2002) Origins of material contrast in scanning ion microscope images. J. Electron Microsc. 51: 207-213.
9. Ohya K, and Ishitani T (2002) Target material dependence of secondary electron images induced by focused ion beams. Surf. Coat. Technol. 158-159: 8-13.
10. Ohya K, and Ishitani T (2003) Comparative study of depth and lateral distributions of electron excitation between scanning ion and scanning electron microscopes. J. Electron Microsc. 52: 291-298.
11. Ishitani T, and Ohya K (2003) Comparison in spatial spreads of secondary electron information between scanning ion and scanning electron microscopes. J. Electron Microsc. 52: 291-298.
12. Hasselkamp D, Rothard H, Groeneveld K O, Kemmler J, Varga P and Winter H (1992) Particle Induced Electron Emission, pp. 1-95 (Springer, Berlin).
13. Nagy I, Anau A, and Echenique P M (1988) Nonlinear calculations for the width of particle states. Phys. Rev. B38: 9191.
14. Rösler M (1993) Theory of ion-induced kinetic electron emission from solids. In Baragiola R A (ed.), Ionization of Solids by Heavy Particles, pp. 27-58 (Plenum, New York, NY).
15. Nishimura K, Kawata J, and Ohya K (2000) Comparative study of secondary electron emission from solids under positron and electron impacts. Nucl. Instr. Meth. B164-165: 903-909
16. Ashley J C (1990) Energy loss rate and inelastic mean free path of low-energy electrons and positrons in condensed matter. J. Electron Spectrosc. Relat. Phenom. 50: 323-334.
17. Fitting H J, and Reinhardt J (1985) Monte Carlo simulation of keV-electron scattering in solids targets. Phys. Status Solid A88: 245-259.
18. Baragiola R A, Alonso E V, and Oliva-Florio A (1979) Electron emission from clean metal surfaces induced by low-energy light ions. Phys. Rev. B19: 121-129.
19. Baragiola R A (1994) Electron emission from slow-ion-solid interactions. In Rabbalais J W (ed.), Low Energy Ion-Surface Interactions, pp. 187-262 (John Wiley and Sons, Chichester).
20. Tanuma S, Powell C J, and Penn D R (1991) Calculations of electron inelastic mean free paths. Surf. Interface Anal. 17: 991-926
21. Cracknell A P (1984) Electron states and Fermi surfaces of elements. In Hellwege K H and Olsen J L (eds), Numerical Data and Functional Relationships in Science and Technology. Vol. 13, pp. 26-407 (Springer, Berlin).
22. Lide D E, ed. (1993) Handbook of Chemistry and Physics, pp. 12,105-12,106 (CRC, Boca Raton, FL).
23. Schartner K H (1988) Tables of ion induced electron yield. Updated data available at http://www.uni-giessen.de/1.physik/schartner/atom/psi/EEData.html.
24. Baragiola R A, Alonso E V, Ferron J, and Oliva-Florio A (1979) Ioninduced electron emission from clean metals. Surf. Sci. 90: 240-255.
25. Zalm P C, and Beckers L J (1984) Secondary electron yields from clean polycrystalline metal surfaces bombarded by 5-20 keV hydrogen or noble gas ions. Philips J. Tes. 39: 61-76.
26. Joy D C (1995) A database on electron-solid interactions. Scanning 17: 270-275.
27. Goldstein J I, Newbury D E, Echlin P, Joy D C, Roming, Jr., Lyman C E, Fiori C, and Lifshin E (1992) Scanning Electron Microscopy and Xray Microanalysis. Chapter 3, pp. 114 (Plenum Press, New York and London).
28. Fraga S, Karwowski J, and Saxena K M S (1976) Handbook of Atomic Data, Physical Sciences Data 5, pp. 467-473 (Elsevier).
29. Sternglass E J (1957) Theory of secondary electron emission by high-speed ions. Phys. Rev. 108: 1-12.
30. Ohya K (1992) Deviation from the inverse cosine law upon incident angle of secondary electron emission from solids under electron and proton bombardments. J. Phys. Soc. Jpn. 61: 3013.
31. Ohya K, and Kawata J (1994) Monte Carlo study of incident-angle dependence of ion-induced kinetic electron emission from solids. Nucl. Instrum. Meth. Phys. Res. B90: 552-555.
32. Brusilovsky B A (1985) Directional effects in kinetic ion-emission. Vacuum 35: 595-615.