Electrical resistivity measurements of layer number determined multilayer graphene wiring for future large scale integrated circuit interconnects

Japanese Journal of Applied Physics

Volumn 52, Issue 6 PART 2, 2013, Pages

  Ito, Kazuyuki ^a   Katagiri, Masayuki ^b   Sakai, Tadashi ^b   Awano, Yuji ^a  

^a KEIO UNIVERSITY   (Japan)

^b Low Power Electronics Association and Project (LEAP)   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACCURATE MEASUREMENT; DETERMINATION METHODS; ELECTRICAL RESISTANCES; ELECTRICAL RESISTIVITY MEASUREMENTS; FOUR-PROBE METHODS; LARGE SCALE INTEGRATED CIRCUIT; MULTILAYER GRAPHENE; PARALLEL CONDUCTION;

ATOMIC FORCE MICROSCOPY; GRAPHENE; MULTILAYERS; PROBES; SHEET RESISTANCE; TRANSMISSION ELECTRON MICROSCOPY;

INTEGRATED CIRCUITS;

EID: 84880999007     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.7567/JJAP.52.06GD08     Document Type: Conference Paper

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