Bimaterial microcantilevers with black silicon nanocone arrays

Sensors and Actuators, A: Physical

Volumn 199, Issue , 2013, Pages 143-148

  Kwon, Beomjin ^a   Jiang, Jing ^a   Schulmerich, Matthew V ^a,b   Xu, Zhida ^a   Bhargava, Rohit ^a,b,c   Liu, Gang Logan ^a   King, William P ^a,b  

^a University of Illinois at Urbana Champaign   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^c UNIVERSITY OF ILLINOIS AT CHICAGO   (United States)

Author keywords

Absorbance; Bimaterial; Black silicon; Fourier transform infrared (FTIR); Infrared; Microcantilever; Nanocone arrays; Thermomechanical

Indexed keywords

ABSORBANCES; BI-MATERIAL; BLACK SILICON; FOURIER TRANSFORM INFRARED; MICRO-CANTILEVERS; NANOCONE ARRAYS; THERMO-MECHANICAL;

CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INFRARED RADIATION; MONOCRYSTALLINE SILICON; NANOCANTILEVERS; NANOSTRUCTURES; SINGLE CRYSTALS; THERMAL EXPANSION;

SILICON WAFERS;

EID: 84879568496     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2013.05.007     Document Type: Article

References (33)

1. J.R. Barnes, R.J. Stephenson, C.N. Woodburn, S.J. Oshea, M.E. Welland, T. Rayment, J.K. Gimzewski, and C. Gerber A femtojoule calorimeter using micromechanical sensors Review of Scientific Instruments 65 1994 3793 3798
2. B. Kwon, M. Rosenberger, R. Bhargava, D.G. Cahill, and W.P. King Dynamic thermomechanical response of bimaterial microcantilevers to periodic heating by infrared radiation Review of Scientific Instruments 83 2012 015003 15007
3. J. Lai, T. Perazzo, Z. Shi, and A. Majumdar Optimization and performance of high-resolution micro-optomechanical thermal sensors Sensors and Actuators A: Physical 58 1997 113 119 (Pubitemid 127433495)
4. M.R. Rosenberger, B. Kwon, D.G. Cahill, and W.P. King Impact of silicon nitride thickness on the infrared sensitivity of silicon nitride-aluminum microcantilevers Sensors and Actuators A: Physical 185 2012 17 23
5. S. Shen, A. Narayanaswamy, and G. Chen Surface phonon polaritons mediated energy transfer between nanoscale gaps Nano Letters 9 2009 2909 2913
6. S. Sadat, Y.J. Chua, W. Lee, Y. Ganjeh, K. Kurabayashi, E. Meyhofer, and P. Reddy Room temperature picowatt-resolution calorimetry Applied Physics Letters 99 2011 043106 43113
7. P.G. Datskos, M.J. Sepaniak, C.A. Tipple, and N. Lavrik Photomechanical chemical microsensors Sensors and Actuators B: Chemical 76 2001 393 402 (Pubitemid 32513911)
8. C.W. Van Neste, L.R. Senesac, D. Yi, and T. Thundat Standoff detection of explosive residues using photothermal microcantilevers Applied Physics Letters 92 2008 134102
9. M. Yun, S. Kim, D. Lee, N. Jung, I. Chae, S. Jeon, and T. Thundat Photothermal cantilever deflection spectroscopy of a photosensitive polymer Applied Physics Letters 100 2012 204103 204104
10. D. Grbovic, N.V. Lavrik, P.G. Datskos, D. Forrai, E. Nelson, J. Devitt, and B. McIntyre Uncooled infrared imaging using bimaterial microcantilever arrays Applied Physics Letters 89 2006 073118 73123
11. B. Kwon, M.V. Schulmerich, L.J. Elgass, R. Kong, S.E. Holton, R. Bhargava, and W.P. King Infrared microspectroscopy combined with conventional atomic force microscopy Ultramicroscopy 116 2012 56 61
12. Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching Optomechanical uncooled infrared imaging system: design, microfabrication, and performance Journal of Microelectromechanical Systems 11 2002 136 146 (Pubitemid 34515169)
13. A. Narayanaswamy, S. Shen, and G. Chen Near-field radiative heat transfer between a sphere and a substrate Physical Review B 78 2008 115303
14. P.G. Datskos, N.V. Lavrik, and S. Rajic Performance of uncooled microcantilever thermal detectors Review of Scientific Instruments 75 2004 1134 1148
15. Y. Chen, Z. Xu, M.R. Gartia, D. Whitlock, Y. Lian, and G.L. Liu Ultrahigh throughput silicon nanomanufacturing by simultaneous reactive ion synthesis and etching ACS Nano 5 2011 8002 8012
16. Y.F. Huang, S. Chattopadhyay, Y.J. Jen, C.Y. Peng, T.A. Liu, Y.K. Hsu, C.L. Pan, H.C. Lo, C.H. Hsu, Y.H. Chang, C.S. Lee, K.H. Chen, and L.C. Chen Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures Nature Nanotechnology 2 2007 770 774 (Pubitemid 350223350)
17. S. Koynov, M.S. Brandt, and M. Stutzmann Black nonreflecting silicon surfaces for solar cells Applied Physics Letters 88 2006 203107 203113
18. M.Y. Shen, C.H. Crouch, J.E. Carey, and E. Mazur Femtosecond laser-induced formation of submicrometer spikes on silicon in water Applied Physics Letters 85 2004 5694 5696 (Pubitemid 40162566)
19. Z. Xu, J. Jiang, M.R. Gartia, and G.L. Liu Monolithic integrations of slanted silicon nanostructures on 3D microstructures and their application to surface-enhanced raman spectroscopy Journal of Physical Chemistry C 116 2012 24161 24170
20. R. Bhargava Infrared spectroscopic imaging: the next generation Applied Spectroscopy 66 2012 1091 1120
21. R.K. Reddy, M.J. Walsh, M.V. Schulmerich, P.S. Carney, and R. Bhargava High-definition infrared spectroscopic imaging Applied Spectroscopy 67 2013 93 105
22. B. Kwon, C. Wang, K. Park, R. Bhargava, and W.P. King Thermomechanical sensitivity of microcantilevers in the mid-infrared spectral region Nanoscale and Microscale Thermophysical Engineering 15 2011 16 27
23. F.P. Incropera, and D.P. DeWitt Fundamentals of Heat Transfer 1981 Wiley New York
24. A. Narayanaswamy, and N. Gu Heat transfer from freely suspended bimaterial microcantilevers Journal of Heat Transfer-Transactions of the ASME 133 2011
25. P. Yeh Optical waves in Layered Media 2005 John Wiley & Sons Inc. Hoboken, New Jersey
26. M. Asheghi, K. Kurabayashi, R. Kasnavi, and K.E. Goodson Thermal conduction in doped single-crystal silicon films Journal of Applied Physics 91 2002 5079 5088
27. E.D. Palik Handbook of Optical Constants of Solids vol. III 1985 Academic New York
28. J.-P. Bourgoin, G.-G. Allogho, and A. Hache Thermal conduction in thin films measured by optical surface thermal lensing Journal of Applied Physics 108 2010 073520 73526
29. B.J. Davis, P.S. Carney, and R. Bhargava Theory of mid-infrared absorption microspectroscopy. II. Heterogeneous samples Analytical Chemistry 82 2010 3487 3499
30. B.J. Davis, P.S. Carney, and R. Bhargava Theory of midinfrared absorption microspectroscopy. I. Homogeneous samples Analytical Chemistry 82 2010 3474 3486
31. P.R. Wilkinson, and J.K. Gimzewski Thin film interference in the optomechanical response of micromechanical silicon cantilevers Applied Physics Letters 89 2006 241916 241923
32. Q.M. Brewster Thermal Radiative Transfer and Properties 1992 John Wiley & Sons Inc. New York
33. G.D. Mahan, and D.T.F. Marple Infrared absorption of thin metal films: Pt on Si Applied Physics Letters 42 1983 219 221