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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 30, Issue 1, 2012, Pages

Mechanical response of atomic layer deposition alumina coatings on stiff and compliant substrates

(1) Bull, Steve J a

a NEWCASTLE UNIVERSITY (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA COATING; ANALYSIS METHOD; COATING PROPERTIES; COMPLIANT MATERIALS; COMPLIANT SUBSTRATES; DEPOSITION TEMPERATURES; HARDNESS VALUES; INTRINSIC DIFFERENCES; MEASUREMENT METHODS; MECHANICAL RESPONSE; MODELING APPROACH; THICK COATINGS;

ALUMINA; ATOMIC LAYER DEPOSITION; COMPOSITE COATINGS; ELASTIC MODULI; HARD COATINGS; NANOINDENTATION; STIFFNESS;

SUBSTRATES;

EID: 84855604128 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3670401 Document Type: Article

Times cited : (32)

References (19)

1
- 33745809830
- The mechanical properties of atomic layer deposited alumina for use in micro- and nano-electromechanical systems
- DOI 10.1016/j.sna.2006.01.029, PII S0924424706000483
- M. K. Tripp, C. Stampfer, D. C. Miller, T. Helbling, C. F. Herrmann, C. Hierold, K. Gall, S. M. George, and V. M. Bright, Sens. Actuators, A, 130-131, 419 (2006). 10.1016/j.sna.2006.01.029 (Pubitemid 44037353)
- (2006) Sensors and Actuators, A: Physical , vol.130-131 , Issue.SPEC. ISS. , pp. 419-429
- Tripp, M.K.¹ Stampfer, C.² Miller, D.C.³ Helbling, T.⁴ Herrmann, C.F.⁵ Hierold, C.⁶ Gall, K.⁷ George, S.M.⁸ Bright, V.M.⁹

2
- 44349143525
- 3 films grown by atomic layer deposition
- DOI 10.1149/1.2919106
- K. Tapily, J. E. Jakes, D. S. Stone, P. Shrestha, D. Gu, H. Baumgart, and A. A. Elmustafa, J. Electrochem. Soc. 155, H545 (2008). 10.1149/1.2919106 (Pubitemid 351747828)
- (2008) Journal of the Electrochemical Society , vol.155 , Issue.7
- Tapily, K.¹ Jakes, J.E.² Stone, D.S.³ Shrestha, P.⁴ Gu, D.⁵ Baumgart, H.⁶ Elmustafa, A.A.⁷

3
- 34249027033
- 3) thin films on a high-Q mechanical silicon oscillator
- DOI 10.1088/0960-1317/17/4/010, PII S0960131707354053, 010
- O. Hahtela, P. Sievila, N. Chekurov, and I. Tittonen, J. Micromech. Microeng. 17, 737 (2007). 10.1088/0960-1317/17/4/010 (Pubitemid 46778430)
- (2007) Journal of Micromechanics and Microengineering , vol.17 , Issue.4 , pp. 737-742
- Hahtela, O.¹ Sievila, P.² Chekurov, N.³ Tittonen, I.⁴

4
- 33947228950
- 3/ZnO alloys
- DOI 10.1016/j.sna.2006.07.002, PII S0924424706004730, Special Issue of The Micromechanics section of Sensors and Actuators
- C. F. Hermann, F. W. DelRio, D. C. Miller, S. M. George, V. M. Bright, J. L. Ebel, R. E. Strawser, R. Cortez, and K. D. Leedy, Sens. Actuators, A 135, 262 (2007). 10.1016/j.sna.2006.07.002 (Pubitemid 46428094)
- (2007) Sensors and Actuators, A: Physical , vol.135 , Issue.1 , pp. 262-272
- Herrmann, C.F.¹ DelRio, F.W.² Miller, D.C.³ George, S.M.⁴ Bright, V.M.⁵ Ebel, J.L.⁶ Strawser, R.E.⁷ Cortez, R.⁸ Leedy, K.D.⁹

5
- 29044433258
- Nanoindentation of coatings
- DOI 10.1088/0022-3727/38/24/R01, PII S0022372705817607
- S. J. Bull, J. Phys. D 38, R393 (2005). 10.1088/0022-3727/38/24/R01 (Pubitemid 41788269)
- (2005) Journal of Physics D: Applied Physics , vol.38 , Issue.24
- Bull, S.J.¹

6
- 0026875935
- 10.1557/JMR.1992.1564
- W. C. Oliver and G. M. Pharr, J. Mater. Res. 7, 1564 (1992). 10.1557/JMR.1992.1564
- (1992) J. Mater. Res. , vol.7 , pp. 1564
- Oliver, W.C.¹ Pharr, G.M.²

7
- 58749100999
- 10.1016/j.vacuum.2008.11.007
- J. Chen and S. J. Bull, Vacuum, 83 911 (2009). 10.1016/j.vacuum.2008.11. 007
- (2009) Vacuum , vol.83 , pp. 911
- Chen, J.¹ Bull, S.J.²

8
- 0001034130
- 10.1116/1.577226
- C. Soto and W. T. Tysoe, J. Vac. Sci. Technol. A 9, 2686 (1991). 10.1116/1.577226
- (1991) J. Vac. Sci. Technol. A , vol.9 , pp. 2686
- Soto, C.¹ Tysoe, W.T.²

9
- 0345373827
- 10.1088/0022-3727/36/7/201
- C. Jeynes, N. P. Barradas, P.K. Marriott, G. Boudreault, M. Jenkin, E. Wendler and R. P. Webb, J. Phys. D: Appl. Phys. 36, R97 (2003). 10.1088/0022-3727/36/7/201
- (2003) J. Phys. D: Appl. Phys. , vol.36 , pp. 97
- Jeynes, C.¹ Barradas, N.P.² Marriott, P.K.³ Boudreault, G.⁴ Jenkin, M.⁵ Wendler, E.⁶ Webb, R.P.⁷

10
- 29044433143
- 10.1023/B:JMSC.0000035319.81486.62.
- J. F. Thurn and R. F. Cook, J. Mater. Res. 39, 4809 (2004) 10.1023/B:JMSC.0000035319.81486.62.
- (2004) J. Mater. Res. , vol.39 , pp. 4809
- Thurn, J.F.¹ Cook, R.F.²

11
- 60949094701
- ISO 14577 International Standards Organisation, Geneva, Switzerland
- ISO 14577, Metallic materials-Instrumented indentation test for hardness and materials parameters-Part 4. Test method for metallic and non-metallic coatings, International Standards Organisation, Geneva, Switzerland (2007).
- (2007) Metallic Materials-Instrumented Indentation Test for Hardness and Materials Parameters-Part 4. Test Method for Metallic and Non-metallic Coatings

12
- 0036743253
- S. J. Bull, Z. Metallkd. 93, 870 (2002).
- (2002) Z. Metallkd. , vol.93 , pp. 870
- Bull, S.J.¹

13
- 2342641250
- S. J. Bull, Z. Metallkd. 94, 787 (2003).
- (2003) Z. Metallkd. , vol.94 , pp. 787
- Bull, S.J.¹

14
- 79960391799
- 10.1016/j.crme.2011.05.009
- S. J. Bull, C. R. Mec. 339, 518 (2011). 10.1016/j.crme.2011.05.009
- (2011) C. R. Mec. , vol.339 , pp. 518
- Bull, S.J.¹

15
- 78249245724
- 10.1016/j.sna.2010.09.018
- D. C. Miller, R. F. Foster, S. H. Jen, J. A. Bertrand, S. J. Cunningham, A. S. Morris, Y. C. Lee, S. M. George, and M. L. Dunn, Sens. Actuators, A 164, 58 (2010). 10.1016/j.sna.2010.09.018
- (2010) Sens. Actuators, A , vol.164 , pp. 58
- Miller, D.C.¹ Foster, R.F.² Jen, S.H.³ Bertrand, J.A.⁴ Cunningham, S.J.⁵ Morris, A.S.⁶ Lee, Y.C.⁷ George, S.M.⁸ Dunn, M.L.⁹

16
- 28044471578
- 3 atomic layer deposition on polymers
- DOI 10.1021/cm050704d
- C. A. Wilson, R. K. Grubbs, and S. M. George, Chem. Mater. 17, 5625 (2005). 10.1021/cm050704d (Pubitemid 41692215)
- (2005) Chemistry of Materials , vol.17 , Issue.23 , pp. 5625-5634
- Wilson, C.A.¹ Grubbs, R.K.² George, S.M.³

17
- 79955987564
- Role of hydrogen for the elastic properties of alumina thin films
- DOI 10.1063/1.1448389
- J. M. Schneider, K. Larrson, J. Lu, E. Olsson, and B. Hjorvarsson, Appl. Phys. Lett., 80, 1144 (2002). 10.1063/1.1448389 (Pubitemid 34180506)
- (2002) Applied Physics Letters , vol.80 , Issue.7 , pp. 1144
- Schneider, J.M.¹ Larsson, K.² Lu, J.³ Olsson, E.⁴ Hjorvarsson, B.⁵

18
- 1242320224
- 10.1021/cm0304546
- M. D. Groner, F. H. Fabreguette, J. W. Elam, and S. M. George, Chem. Mater. 16, 639 (2004). 10.1021/cm0304546
- (2004) Chem. Mater. , vol.16 , pp. 639
- Groner, M.D.¹ Fabreguette, F.H.² Elam, J.W.³ George, S.M.⁴

19
- 84855570472
- A simple method for the assessment of the contact modulus for coated systems
- (to be published).
- S. J. Bull, A simple method for the assessment of the contact modulus for coated systems., J. Mater. Res. (to be published).
- J. Mater. Res.
- Bull, S.J.¹

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