Digital projection photochemical etching defines gray-scale features

Optics Express

Volumn 21, Issue 11, 2013, Pages 13547-13554

  Edwards, Chris ^a   Wang, Kaiyuan ^a   Zhou, Renjie ^a   Bhaduri, Basanta ^a   Popescu, Gabriel ^a   Goddard, Lynford L ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL CONSTANTS; OPTICS;

ARCHIMEDEAN SPIRAL; DIGITAL PROJECTION; DIGITAL PROJECTORS; ETCHING PATTERN; LASER SCANNING METHODS; MULTI-LEVEL STRUCTURES; PHOTOCHEMICAL ETCHING; PROCESSING STEPS;

ETCHING;

EID: 84878884952     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.21.013547     Document Type: Article

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