Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method

Optics Express

Volumn 18, Issue 19, 2010, Pages 20334-20343

  Chen, Feng ^a   Liu, Hewei ^a   Yang, Qing ^b   Wang, Xianhua ^a   Hou, Cong ^a   Bian, Hao ^a   Liang, Weiwei ^a   Si, Jinhai ^a   Hou, Xun ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

^b XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; GLASS; GLASS LASERS; HYDROFLUORIC ACID; MICROLENSES; MICROOPTICS; OPTICAL INSTRUMENT LENSES; SILICA;

CHEMICAL WET ETCHING; ETCHING METHOD; ETCHING TIME; FEMTOSECONDS; FLEXIBLE CONTROL; FS LASER; HYDROFLUORIC ACID ETCHING; IN-SITU; MASK LESS; MASKLESS FABRICATION; MICRO-LENS ARRAYS; NUMBER OF SHOTS; PACKING PATTERNS; PULSE ENERGIES; SILICA GLASS; SURFACE QUALITIES; THERMAL REFLOW PROCESS;

WET ETCHING;

SILICON DIOXIDE;

ARTICLE; CHEMISTRY; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; LASER; OPTICAL INSTRUMENTATION; RADIATION EXPOSURE; WETTABILITY;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; LASERS; LENSES; MINIATURIZATION; SILICON DIOXIDE; WETTABILITY;

EID: 77957012303     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.020334     Document Type: Article

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