Principles of meniscus-based MEMS gas or liquid pressure sensors

Journal of Microelectromechanical Systems

Volumn 22, Issue 3, 2013, Pages 670-677

  Suter, Jonathan D ^a   Hohimer, Cameron J ^a   Fricke, Jacob M ^a   Christ, Josef ^a   Kim, Hanseup ^b   Evans, Allan T ^a  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

^b University of Utah   (United States)

Author keywords

Capacitive sensing; microfabrication; microfluidics; pressure sensors

Indexed keywords

CAPACITIVE SENSING; FUNDAMENTAL CONCEPTS; GAS/LIQUID INTERFACE; HARSH ENVIRONMENT; HYDRAULIC DIAMETER; MENISCUS INTERFACE; MICROELECTROMECHANICAL-SYSTEMS TECHNOLOGIES; OPTICAL MEASUREMENT;

ATMOSPHERIC PRESSURE; ELECTROMECHANICAL DEVICES; LIQUIDS; MEMS; MICROFABRICATION; MICROFLUIDICS; OPTICAL DATA PROCESSING; PRESSURE SENSORS;

PHASE INTERFACES;

EID: 84878534413     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2013.2239258     Document Type: Article

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