Design, fabrication, and testing of VDP MEMS pressure sensors

Microsystem Technologies

Volumn 17, Issue 8, 2011, Pages 1301-1310

  Cassel, Robert ^a   Mian, Ahsan ^a   Kaiser, Todd ^a  

^a Idaho National Laboratory   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIAXIAL STRESS STATE; DIFFERENT SIZES; DOPING CONCENTRATION; GEOMETRIC EFFECTS; LINEAR RESPONSE; MEMS PRESSURE SENSOR; PIEZO-RESISTIVE; PIEZORESISTIVE PRESSURE SENSORS; PIEZORESISTIVE SENSORS; PIEZORESISTIVITY; PRESSURE SENSING; PRESSURE SENSITIVITIES; RESISTANCE EQUATIONS; SENSOR ELEMENTS; SILICON DIAPHRAGM; SIMPLE GEOMETRIES; VAN DER PAUW; WHEATSTONE BRIDGES;

BRIDGE CIRCUITS; DIAPHRAGMS; PRESSURE SENSORS; RESISTORS; SILICON WAFERS;

FABRICATION;

EID: 80052612985     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-011-1307-x     Document Type: Article

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