-
1
-
-
0024732785
-
Microrobots and micromechanical systems
-
Sept
-
W. S. N. Trimmer, "Microrobots and micromechanical systems," Sens. Actuators, vol. 19, no. 3, pp. 267-287, Sept. 1989.
-
(1989)
Sens. Actuators
, vol.19
, Issue.3
, pp. 267-287
-
-
Trimmer, W.S.N.1
-
2
-
-
84947654804
-
Infinitesimal machinery
-
Mar
-
R. P. Feynman, "Infinitesimal machinery," J. Microelectromech. Syst., vol. 2, pp. 4-14, Mar. 1993.
-
(1993)
J. Microelectromech. Syst.
, vol.2
, pp. 4-14
-
-
Feynman, R.P.1
-
3
-
-
3943070464
-
Critical review: Adhesion in surface micromechanical structures
-
Jan./Feb
-
R. Maboudian and R. T. Howe, "Critical review: Adhesion in surface micromechanical structures," J. Vac. Sci. Technol. B, Microelectron. Process. Phenom., vol. 15, no. 1, pp. 1-20, Jan./Feb. 1997.
-
(1997)
J. Vac. Sci. Technol. B, Microelectron. Process. Phenom.
, vol.15
, Issue.1
, pp. 1-20
-
-
Maboudian, R.1
Howe, R.T.2
-
4
-
-
0031648044
-
Comparative evaluation of drying techniques for surface micromachining
-
Jan
-
C.-J. Kim, J. Y. Kim, and B. Sridharan, "Comparative evaluation of drying techniques for surface micromachining," Sens. Actuators, vol. 64, no. 1, pp. 17-26, Jan. 1998.
-
(1998)
Sens. Actuators
, vol.64
, Issue.1
, pp. 17-26
-
-
Kim, C.-J.1
Kim, J.Y.2
Sridharan, B.3
-
5
-
-
0031677313
-
Micro-injector with novel virtual chamber neck
-
Heidelberg, Germany
-
F. G. Tseng, C.-J. Kim, and C.-M. Ho, "Micro-injector with novel virtual chamber neck," in Proc. IEEE MEMS '98, Heidelberg, Germany, pp. 57-62.
-
Proc. IEEE MEMS '98
, pp. 57-62
-
-
Tseng, F.G.1
Kim, C.-J.2
Ho, C.-M.3
-
6
-
-
0031682845
-
Microfabricated capillary-driven stop valve and sample injector
-
Heidelberg, Germany
-
P. F. Man, C. H. Mastrangelo, M. A. Burns, and D. T. Burke, "Microfabricated capillary-driven stop valve and sample injector." in Proc. IEEE MEMS '98, Heidelberg, Germany, pp. 45-50.
-
Proc. IEEE MEMS '98
, pp. 45-50
-
-
Man, P.F.1
Mastrangelo, C.H.2
Burns, M.A.3
Burke, D.T.4
-
7
-
-
0001152578
-
Valveless pumping using traversing vapor bubbles in microchannels
-
June
-
T. K. Jun and C.-J. Kim, "Valveless pumping using traversing vapor bubbles in microchannels," J. Appl. Phys., vol. 83, no. 11, pp. 5658-5664, June 1998.
-
(1998)
J. Appl. Phys.
, vol.83
, Issue.11
, pp. 5658-5664
-
-
Jun, T.K.1
Kim, C.-J.2
-
8
-
-
0032666298
-
Multi-element thermo-capillary optical switch and sub-nanometer oil injection for its fabrication
-
Orlando, FL
-
H. Togo, M. Sato, and F. Shimokawa, "Multi-element thermo-capillary optical switch and sub-nanometer oil injection for its fabrication," in Proc. IEEE MEMS '99, Orlando, FL. pp. 418-423.
-
Proc. IEEE MEMS '99
, pp. 418-423
-
-
Togo, H.1
Sato, M.2
Shimokawa, F.3
-
11
-
-
0000849573
-
Continuous electrowetting effect
-
May
-
G. Beni, S. Hackwood, and J. L. Jackel, "Continuous electrowetting effect," Appl. Phys. Lett., vol. 40, no. 10, pp. 912-914. May 1982.
-
(1982)
Appl. Phys. Lett.
, vol.40
, Issue.10
, pp. 912-914
-
-
Beni, G.1
Hackwood, S.2
Jackel, J.L.3
-
12
-
-
0019621813
-
Dynamics of electrowetting displays
-
Oct
-
G. Beni and M. A. Tenan, "Dynamics of electrowetting displays," J. Appl. Phys., vol. 52, no. 10, pp. 6011-6015, Oct. 1981.
-
(1981)
J. Appl. Phys.
, vol.52
, Issue.10
, pp. 6011-6015
-
-
Beni, G.1
Tenan, M.A.2
-
13
-
-
0020764556
-
Electrowetting switch for multimode optical fibers
-
June
-
J. L. Jackel, S. Hackwood, J. J. Veslka, and G. Beni, "Electrowetting switch for multimode optical fibers," Appl. Opt., vol. 22, no. 11, pp. 1765-1770, June 1983.
-
(1983)
Appl. Opt.
, vol.22
, Issue.11
, pp. 1765-1770
-
-
Jackel, J.L.1
Hackwood, S.2
Veslka, J.J.3
Beni, G.4
-
14
-
-
36749108965
-
Electro-wetting displays
-
Feb
-
G. Beni and S. Hackwood, "Electro-wetting displays," Appl. Phys. Lett., vol. 38, no. 4, pp. 207-209, Feb. 1981.
-
(1981)
Appl. Phys. Lett.
, vol.38
, Issue.4
, pp. 207-209
-
-
Beni, G.1
Hackwood, S.2
-
15
-
-
0006518103
-
Electrowetting optical switch
-
Jan
-
J. L. Jackel, S. Hackwood, and G. Beni, "Electrowetting optical switch," Appl. Phys. Lett., vol. 40, no. 1, pp. 4-6, Jan. 1982.
-
(1982)
Appl. Phys. Lett.
, vol.40
, Issue.1
, pp. 4-6
-
-
Jackel, J.L.1
Hackwood, S.2
Beni, G.3
-
16
-
-
0025661784
-
Preliminary investigation of micropumping based on electrical control of interfacial tension
-
Napa Valley, CA
-
H. Matsumoto and J. E. Colgate, "Preliminary investigation of micropumping based on electrical control of interfacial tension," in Proc. IEEE MEMS '90. Napa Valley, CA, pp. 105-110.
-
Proc. IEEE MEMS '90
, pp. 105-110
-
-
Matsumoto, H.1
Colgate, J.E.2
-
19
-
-
0031682459
-
Liquid micromotor driven by continuous electrowetting
-
Heidelberg, Germany
-
J. Lee and C.-J. Kim, "Liquid micromotor driven by continuous electrowetting," in Proc. IEEE MEMS '98, Heidelberg, Germany, pp. 538-543.
-
Proc. IEEE MEMS '98
, pp. 538-543
-
-
Lee, J.1
Kim, C.-J.2
-
20
-
-
84988759724
-
Microactuation by continuous electrowetting phenomenon and silicon deep RIE process
-
Anaheim, CA, Nov
-
_, "Microactuation by continuous electrowetting phenomenon and silicon deep RIE process," in Proc. MEMS, Anaheim, CA, Nov. 1998, pp. 475-480.
-
(1998)
Proc. MEMS
, pp. 475-480
-
-
-
21
-
-
0032288369
-
Lateral polysilicon microrelays with a mercury micro-drop contact
-
Dec
-
J. Simon, S. Saffer, F. Sherman, and C.-J. Kim, "Lateral polysilicon microrelays with a mercury micro-drop contact." IEEE Trans. Ind. Electron., vol. 45, no. 6, pp. 854-860, Dec. 1998.
-
(1998)
IEEE Trans. Ind. Electron.
, vol.45
, Issue.6
, pp. 854-860
-
-
Simon, J.1
Saffer, S.2
Sherman, F.3
Kim, C.-J.4
-
22
-
-
0343087753
-
-
M.S. thesis, Mech. Aerospace Eng. Dept., Univ. California at Los Angeles, Los Angeles, CA
-
S. M. Saffer, "Formation of mercury micro-drop arrays and polysilicon microrelays with a stationary mercury contact." M.S. thesis, Mech. Aerospace Eng. Dept., Univ. California at Los Angeles, Los Angeles, CA, 1997.
-
(1997)
Formation of Mercury Micro-drop Arrays and Polysilicon Microrelays with a Stationary Mercury Contact
-
-
Saffer, S.M.1
-
23
-
-
0031387108
-
Microgasketing and room temperature wafer joining for liquid-filled MEMS devices
-
Dallas, TX, Nov
-
J. Simon, L.-S. Huang, B. Sridharan, and C.-J. Kim, "Microgasketing and room temperature wafer joining for liquid-filled MEMS devices," in Proc. MEMS, Dallas, TX, Nov. 1997, pp. 29-34.
-
(1997)
Proc. MEMS
, pp. 29-34
-
-
Simon, J.1
Huang, L.-S.2
Sridharan, B.3
Kim, C.-J.4
-
24
-
-
0032309916
-
Microgasketing and adhesive wicking for fabrication of micro fluidic devices
-
Santa Clara, CA, Sept
-
C.-J. Kim, "Microgasketing and adhesive wicking for fabrication of micro fluidic devices," in Proc. Microfluidic Devices Syst./SPIE Symp. Micromachining Microfabrication, Santa Clara, CA, Sept. 1998, pp. 286-291.
-
(1998)
Proc. Microfluidic Devices Syst./SPIE Symp. Micromachining Microfabrication
, pp. 286-291
-
-
Kim, C.-J.1
-
25
-
-
0030677606
-
High-aspect ratio, ultrathick, negative-tone near-UV photoresist for MEMS applications
-
San Diego, CA
-
M. Despont, H. Lorenz, N. Fahrni, J. Brugger, P. Renaud, and P. Vettiger, "High-aspect ratio, ultrathick, negative-tone near-UV photoresist for MEMS applications," in Proc. IEEE MEMS ' 96. San Diego, CA, pp. 162-167.
-
Proc. IEEE MEMS ' 96
, pp. 162-167
-
-
Despont, M.1
Lorenz, H.2
Fahrni, N.3
Brugger, J.4
Renaud, P.5
Vettiger, P.6
-
26
-
-
0031235048
-
A liquid-tilled microrelay with a moving mercury microdrop
-
Sept
-
J. Simon, S. Saffer, and C.-J. Kim, "A liquid-tilled microrelay with a moving mercury microdrop," J. Microelectromech. Syst., vol. 6, pp. 208-216, Sept. 1997.
-
(1997)
J. Microelectromech. Syst.
, vol.6
, pp. 208-216
-
-
Simon, J.1
Saffer, S.2
Kim, C.-J.3
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