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Review of Scientific Instruments

Volumn 81, Issue 6, 2010, Pages

Note: A low leakage liquid seal for micromachined gas valves

(2) Evans, Allan T a Gianchandani, Yogesh B a

a UNIVERSITY OF MICHIGAN (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPILLARY FORCE; CERAMIC PACKAGE; GAS LEAKAGES; GAS LEAKS; GAS VALVES; GLASS SUBSTRATES; LIQUID FLOW; LIQUID SEALANTS; LOW LEAKAGE; MICROMACHINED; PIEZOELECTRIC STACK; VALVE SEATS;

LIQUIDS; SUBSTRATES;

VALVES (MECHANICAL);

2 PROPANOL; GLASS; NITROGEN; SILICON; WATER;

ALGORITHM; ARTICLE; CERAMICS; COMPARATIVE STUDY; EQUIPMENT DESIGN; EVALUATION; GAS; INSTRUMENTATION; MICROFLUIDICS; MICROTECHNOLOGY; PRESSURE;

2-PROPANOL; ALGORITHMS; CERAMICS; EQUIPMENT DESIGN; GASES; GLASS; MICROFLUIDICS; MICROTECHNOLOGY; NITROGEN; PRESSURE; SILICON; WATER;

EID: 77954211878 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.3436642 Document Type: Article

Times cited : (4)

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