Highly sensitive micromachined capacitive pressure sensor with reduced hysteresis and low parasitic capacitance

Sensors and Actuators, A: Physical

Volumn 154, Issue 1, 2009, Pages 35-41

  Pedersen, T ^a   Fragiacomo, G ^a   Hansen, O ^a   Thomsen, E V ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Capacitive pressure sensor; Fusion bonding; Hysteresis

Indexed keywords

AC BRIDGES; CAPACITANCE SIGNAL; CAPACITIVE PRESSURE SENSOR; CAPACITIVE PRESSURE SENSORS; CORROSION-RESISTANT; DISCRETE COMPONENTS; ELECTRONICS CIRCUITS; FUSION BONDING; HEXAGONAL ELEMENTS; HIGH SENSITIVITY; HIGHLY SENSITIVE; LARGE-SIGNALS; LOW-PARASITIC; MEMBRANE STRUCTURES; MICROMACHINED; PARASITIC CAPACITANCE; SIGNAL CONDITIONING; TOUCH MODE; TOUCH MODE CAPACITIVE PRESSURE SENSORS; VACUUM CAVITY;

CAPACITANCE; FLEXIBLE STRUCTURES; HYSTERESIS; PRESSURE SENSORS; PRESSURE TRANSDUCERS;

PARTIAL PRESSURE SENSORS;

EID: 68849086881     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.07.013     Document Type: Article

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