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Volumn 15, Issue 1, 2005, Pages 19-26
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High precision silicon piezo resistive SMART pressure sensor
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 24144456524
PISSN: 17426588
EISSN: 17426596
Source Type: Conference Proceeding
DOI: 10.1088/1742-6596/15/1/004 Document Type: Article |
Times cited : (3)
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References (1)
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