Monolithically integrated glass microlens scanner using a thermal reflow process

Journal of Micromechanics and Microengineering

Volumn 23, Issue 6, 2013, Pages

  Yoo, Sunghyun ^a   Ha, Joon Geun ^a   Jin, Joo Young ^a   Ji, Chang Hyeon ^b   Kim, Yong Kweon ^a  

^a Seoul National University   (South Korea)

^b Ewha Womans University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATED DEVICE; INTEGRATED DEVICE; LATERAL COMB DRIVES; MICROLENS SCANNER; MONOLITHICALLY INTEGRATED; SILICON SUBSTRATES; THERMAL REFLOW PROCESS; WAFER-LEVEL FABRICATION;

ATMOSPHERIC PRESSURE; FABRICATION; GLASS; LASER RECORDING; MONOLITHIC INTEGRATED CIRCUITS; NATURAL FREQUENCIES; SCANNING; SILICON WAFERS;

MICROLENSES;

EID: 84878143837     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/6/065012     Document Type: Article

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