Robust free space board-to-board optical interconnect with closed loop MEMS tracking

Applied Physics A: Materials Science and Processing

Volumn 95, Issue 4, 2009, Pages 973-982

  Chou, Jeffrey ^a   Yu, Kyoungsik ^a   Horsley, David ^b   Yoxall, Brian ^b   Mathai, Sagi ^c   Tan, Michael R T ^c   Wang, Shih Yuan ^c   Wu, Ming C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b University of California   (United States)

^c HEWLETT PACKARD LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BULK- MICROMACHINING; CLOSED LOOPS; CLOSED-LOOP; COMB-DRIVE ACTUATOR; DEEP REACTIVE ION ETCHING; DERIVATIVE CONTROLLERS; EYE DIAGRAMS; FREE SPACE; FREE-SPACE OPTICAL; MECHANICAL NOISE; MECHANICAL VIBRATION NOISE; MICROLENS SCANNER; MODULATION RATES; NOISE REDUCTIONS; OPTICAL ALIGNMENTS; OPTICAL BEAMS; OPTICAL INTERCONNECT; PROPORTIONAL INTEGRAL; SILICON ON INSULATOR WAFERS; VERTICAL CAVITY SURFACE EMITTING LASER;

ELECTRIC POWER SYSTEM INTERCONNECTION; ELECTRON BEAM LITHOGRAPHY; ELECTROSTATIC ACTUATORS; INTEGRATED OPTICS; MICROLENSES; MICROMACHINING; OPTICAL INTERCONNECTS; REACTIVE ION ETCHING; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SURFACE EMITTING LASERS; VIBRATIONS (MECHANICAL);

SCANNING;

EID: 67649240700     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-009-5126-1     Document Type: Article

References (29)

1. N. Savage 2002 Linking with light (high-speed optical interconnects) IEEE Spectrum 39 8 32 36
2. S.S. Lee L.Y. Lin K.S.J. Pister M.C. Wu H.C. Lee P. Grodzinski 1995 Passively aligned hybrid integration of 8 times; 1 micromachined micro-Fresnel lens arrays and 8 times; 1 vertical-cavity surface-emitting laser arrays for free-space optical interconnect IEEE Photonics Technol. Lett. 7 9 1031 1033
3. E.M. Strzelecka D.A. Louderback B.J. Thibeault G.B. Thompson K. Bertilsson L.A. Coldren 1998 Parallel free-space optical interconnect based on arrays of vertical-cavity lasers and detectors with monolithic microlenses Appl. Opt. 37 14 2811 2821
4. L.J. Camp R. Sharma M.R. Feldman 1994 Guided-wave and free-space optical interconnects for parallel-processing systems: a comparison Appl. Opt. 33 26 6168 6180
5. V.N. Morozov Y.-C. Lee J.A. Neff D. O'Brien T.S. McLaren H. Zhou 1996 Tolerance analysis for three-dimensional optoelectronic systems packaging Opt. Eng. 35 7 2034 2044
6. A.G. Kirk D.V. Plant M.H. Ayliffe M. Chateauneuf F. Lacroix 2003 Design rules for highly parallel free-space optical interconnects IEEE J. Sel. Top. Quantum Electron. 9 2 531 547
7. G.C. Boisset B. Robertson H.S. Hinton 1995 Design and construction of an active alignment demonstrator for a free-space optical interconnect IEEE Photonics Technol. Lett. 7 6 676
8. K. Hirabayashi T. Yamamoto S. Hino Y. Kohama K. Tateno 1997 Optical beam direction compensating system for board-to-board free space optical interconnection in high-capacity ATM switch J. Lightw. Technol. 15 5 874 882
9. M. Naruse S. Yamamoto M. Ishikawa 2001 Real-time active alignment demonstration for free-space optical interconnections IEEE Photonics Technol. Lett. 13 11 1257
10. C.J. Henderson D.G. Leyva T.D. Wilkinson 2006 Free space adaptive optical interconnect at 1.25 Gb/s, with beam steering using a ferroelectric liquid-crystal SLM J. Lightw. Technol. 24 5 1989 1997
11. M. Aljada K.E. Alameh Y.-T. Lee I.-S. Chung 2006 High-speed (2.5 Gbps) reconfigurable inter-chip optical interconnects using opto-VLSI processors Opt. Express 14 15 6823 6836
12. A. Tuantranont V.M. Bright J. Zhang W. Zhang J.A. Neff Y.C. Lee 2001 Optical beam steering using MEMS-controllable microlens array Sens. Actuators A, Phys. 91 3 363 372 10.1016/S0924-4247(01)00609-4
13. K. Hedsten J. Melin J. Bengtsson P. Modh D. Karlén B. Löfving R. Nilsson H. Rödjegård K. Persson P. Enoksson F. Nikolajeff G. Andersson 2008 MEMS-based vcsel beam steering using replicated polymer diffractive lens Sens. Actuators A, Phys. 142 1 336 345 10.1016/j.sna.2006.12. 015
14. M.T.B.E.A. Saleh, Fundamentals of Photonics (Wiley-Interscience, New York, 1991)
15. C. Marxer, O. Manzardo, H.P. Herzig, R. Dändliker, N.F. de Rooij, An electrostatic actuator with large dynamic range and linear displacement-voltage behavior for a miniature spectrometer, pp. 786-789, June 1999
16. M.E.R. Legtenberg A.W. Groeneveld 1996 Comb-drive actuators for large displacements J. Micromech. Microeng 6 320 329
17. H. Toshiyoshi G.D.J. Su J. LaCosse M.C. Wu 2003 A surface micromachined optical scanner array using photoresist lenses fabricated by a thermal reflow process J. Lightw. Technol. 21 7 1700
18. J.F.M.C. Wu O. Solgaard 2006 Optical MEMS for lightwave communication J. Lightw. Technol. 24 12 4433 4454
19. L.P.L.S. Kwon 2004 Micromachined transmissive scanning confocal microscope Opt. Lett. 29 7 706 708
20. R.S.M. Hyuck Choo 2006 Addressable microlens array to improve dynamic range of Shack-Hartmann sensors J. Microelectromechanical Syst. 15 6 1555 1567
21. K. Takahashi H.N. Kwon M. Mita K. Saruta J.H. Lee H. Fujita H. Toshiyoshi 2007 A silicon micromachined formula f-theta microlens scanner array by double-deck device design technique IEEE J. Sel. Top. Quantum Electron. 13 2 277
22. D. Lee U. Krishnamoorthy K. Yu O. Solgaard 2004 Single-crystalline silicon micromirrors actuated by self-aligned vertical electrostatic combdrives with piston-motion and rotation capability Sens. Actuators A, Phys. 114 2-3 423 428 10.1016/j.sna.2003.11.024
23. H.N.H.T.M.W.D. Hah P. Patterson 2004 Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors IEEE J. Sel. Top. Quantum Electron. 10 3 505 513
24. Y. Kyoungsik, P. Namkyoo, L. Daesung, O. Solgaard, Chip-scale high-speed Fourier-transform spectrometer based on a combination of a Michelson and a Fabry-Perot interferometer, in 5th IEEE Conference on Sensors, 2006, pp. 412-415
25. Y. Tsung-Yi J. Gourlay A.C. Walker 2002 Adaptive alignment packaging for 2-d arrays of free-space optical-interconnected optoelectronic systems IEEE Trans. Adv. Packag. 25 1 54 64
26. M.C. Wu 1997 Micromachining for optical and optoelectronic systems Proc. IEEE 85 11 1833
27. B. Potsaid Y. Bellouard J. Wen 2005 Adaptive scanning optical microscope (ASOM): A multidisciplinary optical microscope design for large field of view and high resolution imaging Opt. Express 13 17 6504 6518
28. Y. Kyoungsik P. Namkyoo L. Daesung O. Solgaard 2007 Superresolution digital image enhancement by subpixel image translation with a scanning micromirror IEEE J. Sel. Top. Quantum Electron. 13 2 304 311
29. Z. Lixia J.M. Kahn K.S.J. Pister 2006 Scanning micromirrors fabricated by an SOI/SOI wafer-bonding process J. Microelectromechanical Syst. 15 1 24 32